A multifunctional uhv surface analysis system with low temperature capabilities

XH Feng, EL Garfunkel

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


A custom designed ultrahigh vacuum (uhv) system with multifunctional surface analysis is capabilities is described. The advantages of this system design are: (1) it is relatively inexpensive to construct; (2) it incorporates a wide range of analytical techniques which can be interchanged without difficulty; and (3) it allows one to study samples at low temperature (to 10 K). The chamber is currently equipped with a quadrupole mass spectrometer, a hemispherical electron analyzer, an X-ray source, an ultraviolet light source, an electron gun, a low energy electron diffraction system, a 127° cylindrical sector high resolution electron energy loss spectrometer, a sputtering gun, a metal deposition source and a gas doser. Two low temperature applications are briefly discussed: the study of adsorption precursor states and 'high temperature' superconductors.

Original languageEnglish
Pages (from-to)547-550
Number of pages4
Issue number6
Publication statusPublished - 1989

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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