A novel AFM/STM/SEM system

A. V. Ermakov, Eric Garfunkel

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.

Original languageEnglish
Pages (from-to)2853-2854
Number of pages2
JournalReview of Scientific Instruments
Volume65
Issue number9
DOIs
Publication statusPublished - 1994

Fingerprint

Electron microscopes
electron microscopes
atomic force microscopy
Scanning
scanning
Surface topography
deflection
Electron beams
topography
Microscopes
microscopes
electron beams
Monitoring

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

Cite this

A novel AFM/STM/SEM system. / Ermakov, A. V.; Garfunkel, Eric.

In: Review of Scientific Instruments, Vol. 65, No. 9, 1994, p. 2853-2854.

Research output: Contribution to journalArticle

Ermakov, A. V. ; Garfunkel, Eric. / A novel AFM/STM/SEM system. In: Review of Scientific Instruments. 1994 ; Vol. 65, No. 9. pp. 2853-2854.
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