A novel AFM/STM/SEM system

A. V. Ermakov, Eric Garfunkel

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Abstract

An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.

Original languageEnglish
Pages (from-to)2853-2854
Number of pages2
JournalReview of Scientific Instruments
Volume65
Issue number9
DOIs
Publication statusPublished - 1994

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ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

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