A portable, benchtop photolithography system based on a solid-state light source

Mark D. Huntington, Teri W Odom

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.

Original languageEnglish
Pages (from-to)3144-3147
Number of pages4
JournalSmall
Volume7
Issue number22
DOIs
Publication statusPublished - Nov 18 2011

Fingerprint

Photolithography
Ultraviolet Rays
Masks
Light sources
Light
Costs and Cost Analysis
Ultraviolet radiation
Diodes
Costs

Keywords

  • microfabrication
  • microfluidics
  • nanofabrication
  • photolithography
  • soft lithography

ASJC Scopus subject areas

  • Biomaterials
  • Engineering (miscellaneous)
  • Biotechnology
  • Medicine(all)

Cite this

A portable, benchtop photolithography system based on a solid-state light source. / Huntington, Mark D.; Odom, Teri W.

In: Small, Vol. 7, No. 22, 18.11.2011, p. 3144-3147.

Research output: Contribution to journalArticle

Huntington, Mark D. ; Odom, Teri W. / A portable, benchtop photolithography system based on a solid-state light source. In: Small. 2011 ; Vol. 7, No. 22. pp. 3144-3147.
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