A portable, benchtop photolithography system based on a solid-state light source

Mark D. Huntington, Teri W. Odom

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.

Original languageEnglish
Pages (from-to)3144-3147
Number of pages4
JournalSmall
Volume7
Issue number22
DOIs
Publication statusPublished - Nov 18 2011

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Keywords

  • microfabrication
  • microfluidics
  • nanofabrication
  • photolithography
  • soft lithography

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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