A scalable, CMOS-compatible assembly of ambipolar semiconducting single-walled carbon nanotube devices

Marc Ganzhorn, Aravind Vijayaraghavan, Alexander A. Green, Simone Dehm, Achim Voigt, Michael Rapp, Mark C. Hersam, Ralph Krupke

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

Abstract

Semiconducting single-walled carbon nanotubes are integrated into high-density arrays using dielectrophoresis, which is a CMOS-compatible, bottom-up assembly technique. The devices are statistically analyzed by voltage-contrast scanning electron microscopy and electron transport measurements. Annealing and the choice of parylene substrate are shown to improve device performance.

Original languageEnglish
Pages (from-to)1734-1738
Number of pages5
JournalAdvanced Materials
Volume23
Issue number15
DOIs
Publication statusPublished - Apr 19 2011

Keywords

  • carbon nanotubes
  • chirality
  • dielectrophoresis
  • field-effect transistors

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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