Accurate thickness/density measurements of organic light-emitting diodes

C. H M Marée, R. A. Weller, L. C. Feldman, K. Pakbaz, H. W H Lee

Research output: Contribution to journal › Article

23 Citations (Scopus)

Abstract

We report on the use of Rutherford backscattering spectroscopy for thickness analysis of organic light-emitting diode structures (OLEDs) with subnanometer resolution and a spatial resolution 3). The densities of thin films of evaporated TPD (ρ =1.22±0.05 g/cm 3) and Alq 3 (ρ=1.51±0.03 g/cm 3) have been established.

Original languageEnglish
Pages (from-to)4013-4016
Number of pages4
JournalJournal of Applied Physics
Volume84
Issue number7
Publication statusPublished - Oct 1 1998

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backscattering
light emitting diodes
spatial resolution
thin films
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

Marée, C. H. M., Weller, R. A., Feldman, L. C., Pakbaz, K., & Lee, H. W. H. (1998). Accurate thickness/density measurements of organic light-emitting diodes. Journal of Applied Physics, 84(7), 4013-4016.

Accurate thickness/density measurements of organic light-emitting diodes. / Marée, C. H M; Weller, R. A.; Feldman, L. C.; Pakbaz, K.; Lee, H. W H.

In: Journal of Applied Physics, Vol. 84, No. 7, 01.10.1998, p. 4013-4016.

Research output: Contribution to journal › Article

Marée, CHM, Weller, RA, Feldman, LC, Pakbaz, K & Lee, HWH 1998, 'Accurate thickness/density measurements of organic light-emitting diodes', Journal of Applied Physics, vol. 84, no. 7, pp. 4013-4016.
Marée CHM, Weller RA, Feldman LC, Pakbaz K, Lee HWH. Accurate thickness/density measurements of organic light-emitting diodes. Journal of Applied Physics. 1998 Oct 1;84(7):4013-4016.
Marée, C. H M ; Weller, R. A. ; Feldman, L. C. ; Pakbaz, K. ; Lee, H. W H. / Accurate thickness/density measurements of organic light-emitting diodes. In: Journal of Applied Physics. 1998 ; Vol. 84, No. 7. pp. 4013-4016.
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