TY - JOUR
T1 - ALD synthesis of platinum nanoparticles on single-crystal SrTiO 3 pretreated with wet chemical etching
AU - Wang, Chuandao
AU - Koirala, Pratik
AU - Stair, Peter
AU - Marks, Laurence
N1 - Publisher Copyright:
© 2017 Elsevier B.V.
Copyright:
Copyright 2019 Elsevier B.V., All rights reserved.
PY - 2017/11/15
Y1 - 2017/11/15
N2 - Formic acid-hydrogen peroxide and buffered hydrogen fluoride-hydrogen peroxide solutions were used to etch single-crystal strontium titanate to remove carbon contamination and increase hydroxyl group density to improve atomic layer deposition onto these materials. X-ray photoelectron spectroscopy indicated that both are effective for carbon contamination removal. However, for increasing hydroxyl group density on the strontium titanate surface, the buffered hydrogen fluoride-hydrogen peroxide is more effective. Transmission electron microscopy and x-ray photoemission show enhanced platinum deposition on the etched strontium titanate surface. These results provide the basis for optimizing atomic layer deposition for other technologically relevant materials.
AB - Formic acid-hydrogen peroxide and buffered hydrogen fluoride-hydrogen peroxide solutions were used to etch single-crystal strontium titanate to remove carbon contamination and increase hydroxyl group density to improve atomic layer deposition onto these materials. X-ray photoelectron spectroscopy indicated that both are effective for carbon contamination removal. However, for increasing hydroxyl group density on the strontium titanate surface, the buffered hydrogen fluoride-hydrogen peroxide is more effective. Transmission electron microscopy and x-ray photoemission show enhanced platinum deposition on the etched strontium titanate surface. These results provide the basis for optimizing atomic layer deposition for other technologically relevant materials.
KW - Atomic layer deposition
KW - Etch
KW - Platinum
KW - Surface condition
UR - http://www.scopus.com/inward/record.url?scp=85020667605&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85020667605&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2017.05.187
DO - 10.1016/j.apsusc.2017.05.187
M3 - Article
AN - SCOPUS:85020667605
VL - 422
SP - 661
EP - 665
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -