Ambient AFM nanoscale oxidation of hydrogen-passivated silicon with conductive-diamond-coated probes

Matthew J. Schmitz, C. Reagan Kinser, Norma E. Cortes, Mark C. Hersam

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Nanopatterning of H:Si surfaces was performed using conductive BDD-coated Atomic Force Microscopy (AFM) probes under ambient conditions. The patterned features exhibited chemical etching behavior characteristic of AFM local oxidation, and inspite of relatively high current flow, oxidation was observed to occur via an electric-field-induced oxidation mechanism during nanopatterning. The oxide rate for biases up to 5 V followed a power-of-time law consistent with space-charge limited growth, while the nanolithographic figures of merit for conductive BDD-coated AFM probes were quantified including patterning at low threshold voltage of 1 V. The results coupled with the high wear resistance of diamond establish conductive BDD-coated AFM probes as promosing candidates for the high-throughput nanopatterning applications.

Original languageEnglish
Pages (from-to)2053-2056
Number of pages4
JournalSmall
Volume3
Issue number12
DOIs
Publication statusPublished - Dec 2007

Fingerprint

Diamond
Atomic Force Microscopy
Silicon
Hydrogen
Atomic force microscopy
Diamonds
Oxidation
Threshold voltage
Electric space charge
Oxides
Wear resistance
Etching
Electric fields
Throughput
Growth
7,7'-dimethoxy-(4,4'-bi-1,3-benzodioxole)-5,5'-dicarboxylic acid dimethyl ester

Keywords

  • Atomic force microscopy
  • Diamond
  • Nanolithography
  • Nanopatterning
  • Silicon

ASJC Scopus subject areas

  • Biomaterials
  • Engineering (miscellaneous)
  • Biotechnology
  • Medicine(all)

Cite this

Ambient AFM nanoscale oxidation of hydrogen-passivated silicon with conductive-diamond-coated probes. / Schmitz, Matthew J.; Kinser, C. Reagan; Cortes, Norma E.; Hersam, Mark C.

In: Small, Vol. 3, No. 12, 12.2007, p. 2053-2056.

Research output: Contribution to journalArticle

Schmitz, Matthew J. ; Kinser, C. Reagan ; Cortes, Norma E. ; Hersam, Mark C. / Ambient AFM nanoscale oxidation of hydrogen-passivated silicon with conductive-diamond-coated probes. In: Small. 2007 ; Vol. 3, No. 12. pp. 2053-2056.
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