Amorphous SiC-N coatings: its properties and applications

Andrew L. Yee, Hockchun Ong, Fulin Xiong, Robert P. H. Chang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Laser ablation has been used to deposit a:SiC-N films from a CVD SiC target. Depositions were carried out either in vacuum or in a nitrogen ambient ranging from 10 to 100 mT. The mechanical properties of the films versus nitrogen background pressure were assessed using nanoindentation and surface acoustic wave measurements. Deflected optical beam testing, pull testing and atomic force microscopy were used to determine film stress, film-substrate adhesion and film roughness, respectively. The optical properties were also characterized as a function of nitrogen back pressure using spectroscopic ellipsometry which determined refractive indices and predicted film compositions. Fourier transform infrared spectroscopy determined the bonding structures in the films, and finally Rutherford backscattering spectroscopy measurements were also performed. Based on the best mechanical and optical properties, the optimum film deposition conditions were obtained. It was observed that with an increase in nitrogen background pressure, oxygen content in the film, in the form of SiOx, increased significantly affecting the overall properties of the a:SiC-N films.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages161-166
Number of pages6
Volume356
Publication statusPublished - 1995
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 28 1994Dec 1 1994

Other

OtherProceedings of the 1994 MRS Fall Meeting
CityBoston, MA, USA
Period11/28/9412/1/94

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Yee, A. L., Ong, H., Xiong, F., & Chang, R. P. H. (1995). Amorphous SiC-N coatings: its properties and applications. In Materials Research Society Symposium - Proceedings (Vol. 356, pp. 161-166). Materials Research Society.