An Inkjet Printing Technique for Scalable Microfabrication of Graphene-Based Sensor Components

Yu Min Fu, Meng Chuin Chou, Che Hao Kang, Yu Ting Cheng, Pu Wei Wu, Guan Yu Chen, Ethan B. Secor, Mark C. Hersam

Research output: Contribution to journalArticle

Abstract

This paper presents a versatile and precise graphene patterning technique using the combined process of masking and inkjet printing. A graphene-based structure is fabricated by first defining the structural pattern and position using a masking mold, which can be either electroplated copper or deep reactive ion etching (DRIE) silicon shadow mask, followed by inkjet deposition of graphene ink and lift-off. The hybrid technique can realize high-fidelity, high-resolution graphene-based microstructures including free-standing and cantilever beams, four-point resistive measurement structures, and piezoresistive sensing elements with a minimum line width of ∼ 20μm. Moreover, this method can facilitate the micropatterning of graphene oxide (GO) and reduced graphene oxide (rGO) on substrates such as polydimethylsiloxane (PDMS) and SiO2/Si for selective cell culturing applications. Owing to the characteristics of low chemical usage, low process temperature and complexity, and high flexibility and fault tolerance of inkjet printing, this technique demonstrates compelling potential for a variety of biomedical applications.

Original languageEnglish
Article number9078740
Pages (from-to)79338-79346
Number of pages9
JournalIEEE Access
Volume8
DOIs
Publication statusPublished - 2020

Keywords

  • Microelectromechanical systems
  • inkjet printing
  • microstructure
  • tactile sensors

ASJC Scopus subject areas

  • Computer Science(all)
  • Materials Science(all)
  • Engineering(all)

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    Fu, Y. M., Chou, M. C., Kang, C. H., Cheng, Y. T., Wu, P. W., Chen, G. Y., Secor, E. B., & Hersam, M. C. (2020). An Inkjet Printing Technique for Scalable Microfabrication of Graphene-Based Sensor Components. IEEE Access, 8, 79338-79346. [9078740]. https://doi.org/10.1109/ACCESS.2020.2990501