Anomalous surface segregation of Sb in Si during epitaxial growth

K. Kimura, Y. Endoh, M. Mannami, H. J. Gossmann, G. H. Gilmer, L. C. Feldman

Research output: Contribution to journalArticle

9 Citations (Scopus)

Fingerprint Dive into the research topics of 'Anomalous surface segregation of Sb in Si during epitaxial growth'. Together they form a unique fingerprint.

Physics & Astronomy