Abstract
Growing interest in Fe2O3 as a light harvesting layer in solar energy conversion devices stems from its unique combination of stability, nontoxicity, and exceptionally low material cost. Unfortunately, the known methods for conformally coating high aspect ratio structures with Fe 2O3 leave a glaring gap in the technologically relevant temperature range of 170-350 °C. Here, we elucidate a self-limiting atomic layer deposition (ALD) process for the growth of hematite, α-Fe 2O3, over a moderate temperature window using ferrocene and ozone. At 200 °C, the self-limiting growth of Fe2O 3 is observed at rates up to 1.4 Å/cycle. Dense and robust thin films grown on both fused quartz and silicon exhibit the expected optical bandgap (2.1 eV). In situ mass spectrometric analysis reveals the evolution of two distinct cyclic reaction products during the layer-by-layer growth. The readily available and relatively high vapor pressure iron precursor is utilized to uniformly coat a high surface area template with aspect ratio ∼150.
| Original language | English |
|---|---|
| Pages (from-to) | 4333-4339 |
| Number of pages | 7 |
| Journal | Journal of Physical Chemistry C |
| Volume | 115 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - Mar 17 2011 |
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ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Energy(all)
Cite this
Atomic layer deposition of Fe2O3 using ferrocene and ozone. / Martinson, Alex B F; Devries, Michael J.; Libera, Joseph A.; Christensen, Steven T.; Hupp, Joseph T; Pellin, Michael J.; Elam, Jeffrey W.
In: Journal of Physical Chemistry C, Vol. 115, No. 10, 17.03.2011, p. 4333-4339.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Atomic layer deposition of Fe2O3 using ferrocene and ozone
AU - Martinson, Alex B F
AU - Devries, Michael J.
AU - Libera, Joseph A.
AU - Christensen, Steven T.
AU - Hupp, Joseph T
AU - Pellin, Michael J.
AU - Elam, Jeffrey W.
PY - 2011/3/17
Y1 - 2011/3/17
N2 - Growing interest in Fe2O3 as a light harvesting layer in solar energy conversion devices stems from its unique combination of stability, nontoxicity, and exceptionally low material cost. Unfortunately, the known methods for conformally coating high aspect ratio structures with Fe 2O3 leave a glaring gap in the technologically relevant temperature range of 170-350 °C. Here, we elucidate a self-limiting atomic layer deposition (ALD) process for the growth of hematite, α-Fe 2O3, over a moderate temperature window using ferrocene and ozone. At 200 °C, the self-limiting growth of Fe2O 3 is observed at rates up to 1.4 Å/cycle. Dense and robust thin films grown on both fused quartz and silicon exhibit the expected optical bandgap (2.1 eV). In situ mass spectrometric analysis reveals the evolution of two distinct cyclic reaction products during the layer-by-layer growth. The readily available and relatively high vapor pressure iron precursor is utilized to uniformly coat a high surface area template with aspect ratio ∼150.
AB - Growing interest in Fe2O3 as a light harvesting layer in solar energy conversion devices stems from its unique combination of stability, nontoxicity, and exceptionally low material cost. Unfortunately, the known methods for conformally coating high aspect ratio structures with Fe 2O3 leave a glaring gap in the technologically relevant temperature range of 170-350 °C. Here, we elucidate a self-limiting atomic layer deposition (ALD) process for the growth of hematite, α-Fe 2O3, over a moderate temperature window using ferrocene and ozone. At 200 °C, the self-limiting growth of Fe2O 3 is observed at rates up to 1.4 Å/cycle. Dense and robust thin films grown on both fused quartz and silicon exhibit the expected optical bandgap (2.1 eV). In situ mass spectrometric analysis reveals the evolution of two distinct cyclic reaction products during the layer-by-layer growth. The readily available and relatively high vapor pressure iron precursor is utilized to uniformly coat a high surface area template with aspect ratio ∼150.
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U2 - 10.1021/jp110203x
DO - 10.1021/jp110203x
M3 - Article
VL - 115
SP - 4333
EP - 4339
JO - Journal of Physical Chemistry C
JF - Journal of Physical Chemistry C
SN - 1932-7447
IS - 10
ER -