Abstract
We have studied the HfO 2/Hf and HfO 2/Pt systems by photoemission and inverse photoemission spectroscopies. It is found that the "effective workfunction" of metals in multilayer structures are different than their vacuum workfunctions and are modified by their interface dipoles at the metal/high-k interface. The effective workfunction of Hf is 4.4 eV whereas that of Pt is 5.3 eV, within the range of acceptable values for PMOS and NMOS respectively.
| Original language | English |
|---|---|
| Title of host publication | Proceedings - Electrochemical Society |
| Editors | M.C. Ozturk, L.J. Chen, P.J. Timans, F. Roozeboom, E.P. Gusev |
| Pages | 255-263 |
| Number of pages | 9 |
| Volume | 1 |
| Publication status | Published - 2004 |
| Event | Advanced Short-Time Thermal Processing for Si-Based CMOS Devices II - Proceedings of the International Symposium - San Antonio, TX, United States Duration: May 10 2004 → May 12 2004 |
Other
| Other | Advanced Short-Time Thermal Processing for Si-Based CMOS Devices II - Proceedings of the International Symposium |
|---|---|
| Country | United States |
| City | San Antonio, TX |
| Period | 5/10/04 → 5/12/04 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Band alignment issues in metal/dielectric stacks : A combined photoemission and inverse photoemission study of the HfO 2/Pt and HfO 2/Hf systems. / Sayan, S.; Bartynski, R. A.; Robertson, J.; Suehle, J. S.; Vogel, E.; Nguyen, N. V.; Ehrstein, J.; Kopanski, J. J.; Suzer, S.; Holl, M. Banaszak; Garfunkel, Eric.
Proceedings - Electrochemical Society. ed. / M.C. Ozturk; L.J. Chen; P.J. Timans; F. Roozeboom; E.P. Gusev. Vol. 1 2004. p. 255-263.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Band alignment issues in metal/dielectric stacks
T2 - A combined photoemission and inverse photoemission study of the HfO 2/Pt and HfO 2/Hf systems
AU - Sayan, S.
AU - Bartynski, R. A.
AU - Robertson, J.
AU - Suehle, J. S.
AU - Vogel, E.
AU - Nguyen, N. V.
AU - Ehrstein, J.
AU - Kopanski, J. J.
AU - Suzer, S.
AU - Holl, M. Banaszak
AU - Garfunkel, Eric
PY - 2004
Y1 - 2004
N2 - We have studied the HfO 2/Hf and HfO 2/Pt systems by photoemission and inverse photoemission spectroscopies. It is found that the "effective workfunction" of metals in multilayer structures are different than their vacuum workfunctions and are modified by their interface dipoles at the metal/high-k interface. The effective workfunction of Hf is 4.4 eV whereas that of Pt is 5.3 eV, within the range of acceptable values for PMOS and NMOS respectively.
AB - We have studied the HfO 2/Hf and HfO 2/Pt systems by photoemission and inverse photoemission spectroscopies. It is found that the "effective workfunction" of metals in multilayer structures are different than their vacuum workfunctions and are modified by their interface dipoles at the metal/high-k interface. The effective workfunction of Hf is 4.4 eV whereas that of Pt is 5.3 eV, within the range of acceptable values for PMOS and NMOS respectively.
UR - http://www.scopus.com/inward/record.url?scp=5744247717&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=5744247717&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:5744247717
VL - 1
SP - 255
EP - 263
BT - Proceedings - Electrochemical Society
A2 - Ozturk, M.C.
A2 - Chen, L.J.
A2 - Timans, P.J.
A2 - Roozeboom, F.
A2 - Gusev, E.P.
ER -