Bonding, defects, and defect dynamics in the SiC-SiO 2 system

S. T. Pantelides, R. Buczko, M. Di Ventra, S. Wang, S. G. Kim, S. J. Pennycook, G. Duscher, L. C. Feldman, K. McDonald, R. K. Chanana, R. A. Weller, J. R. Williams, G. Y. Chung, C. C. Tin, T. Isaacs-Smith

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2 Citations (Scopus)

Abstract

This paper presents a review of new results obtained by a combination of first-principles theory, Z-contrast imaging, and electron-energy-loss spectroscopy in the context of a broader experimental/theoretical program to understand and control the atomic-scale structure of SiC-SiO 2 interfaces. The ultimate purpose is to achieve low interface trap densities for device applications. Results are given for global bonding arrangements in comparison with those of the Si-SiO 2 interface, the mechanism of the oxidation process, the nature of possible interface defects and their passivation by N and H, and the formation and dissolution of C clusters in SiO 2 during oxidation and reoxidation.

Original languageEnglish
Pages (from-to)H.3.3.1-H.3.3.9
JournalMaterials Research Society Symposium-Proceedings
Volume640
Publication statusPublished - 2001

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Pantelides, S. T., Buczko, R., Di Ventra, M., Wang, S., Kim, S. G., Pennycook, S. J., Duscher, G., Feldman, L. C., McDonald, K., Chanana, R. K., Weller, R. A., Williams, J. R., Chung, G. Y., Tin, C. C., & Isaacs-Smith, T. (2001). Bonding, defects, and defect dynamics in the SiC-SiO 2 system Materials Research Society Symposium-Proceedings, 640, H.3.3.1-H.3.3.9.