TY - JOUR
T1 - Buried, ordered structures
T2 - Boron in Si(111) and Si(100)
AU - Headrick, R. L.
AU - Weir, B. E.
AU - Levi, A. F J
AU - Eaglesham, D. J.
AU - Feldman, Leonard C
PY - 1991/5/2
Y1 - 1991/5/2
N2 - Two-dimensional, metastable, ordered structures have been prepared by deposition atop unique surface reconstructions. This discovery that surface superlattice structures can be buried in crystalline semiconductors suggests possibilities for ordered doping and ordered alloy structures with new electronic properties. In this paper we summarize our recent results in forming ordered structures of boron on Si(100) and Si(111) and the preservation of these structures under subsequent Si deposition.
AB - Two-dimensional, metastable, ordered structures have been prepared by deposition atop unique surface reconstructions. This discovery that surface superlattice structures can be buried in crystalline semiconductors suggests possibilities for ordered doping and ordered alloy structures with new electronic properties. In this paper we summarize our recent results in forming ordered structures of boron on Si(100) and Si(111) and the preservation of these structures under subsequent Si deposition.
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U2 - 10.1016/0022-0248(91)91093-P
DO - 10.1016/0022-0248(91)91093-P
M3 - Article
AN - SCOPUS:0026413422
VL - 111
SP - 838
EP - 842
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
SN - 0022-0248
IS - 1-4
ER -