Abstract
The overall aim of this work is to produce a parallel e-beam lithography system using an array of field-emitting microguns independently driven by an active matrix array. This paper will describe the work carried out on optimisation of suitable carbon-based materials for use as the electron emitter source in such a system. From initial experiments on field emission from tetrahedrally bonded amorphous carbon (ta-C) and nanocluster carbon films, it has been deduced that emission occurs from nanometre-size sp2 sites within an insulating sp3 matrix. Hence, we have carried out a series of experiments to investigate the possibility of deliberately producing such sp2 regions within a predominantly sp3 matrix using e-beam irradiation, high energy ion beam irradiation and post deposition plasma processing of ta-C. Unfortunately, although the use of 1GeV uranium ions successfully produced arrays of sp2 rich regions on the required nanometre scale, no preferential field emission from such sites could be obtained. The final series of experiments were thence carried out using aligned carbon nanotubes (CNTs) as the electron sources. Results on aligned CNTs, grown using a dc plasma technique and a Ni catalyst, are presented. Both the diameter and length of the CNTs are dependent upon the thickness of the catalytic layer used. Field emission from an array of CNTs was obtained.
| Original language | English |
|---|---|
| Pages (from-to) | 235-247 |
| Number of pages | 13 |
| Journal | New Diamond and Frontier Carbon Technology |
| Volume | 11 |
| Issue number | 4 |
| Publication status | Published - 2001 |
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Keywords
- Carbon nanotubes
- Diamond-like carbon
- Field emission
ASJC Scopus subject areas
- Materials Science(all)
- Surfaces, Coatings and Films
- Surfaces and Interfaces
Cite this
Carbon Films for Use as the Electron Source in a Parallel e-Beam Lithography System. / Milne, W. I.; Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Yuan, J.; Robertson, J.; Legagneux, P.; Pirio, G.; Pribat, D.; Bouzehouane, K.; Bruenger, W.; Trautmann, C.
In: New Diamond and Frontier Carbon Technology, Vol. 11, No. 4, 2001, p. 235-247.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Carbon Films for Use as the Electron Source in a Parallel e-Beam Lithography System
AU - Milne, W. I.
AU - Teo, K. B K
AU - Chhowalla, Manish
AU - Amaratunga, G. A J
AU - Yuan, J.
AU - Robertson, J.
AU - Legagneux, P.
AU - Pirio, G.
AU - Pribat, D.
AU - Bouzehouane, K.
AU - Bruenger, W.
AU - Trautmann, C.
PY - 2001
Y1 - 2001
N2 - The overall aim of this work is to produce a parallel e-beam lithography system using an array of field-emitting microguns independently driven by an active matrix array. This paper will describe the work carried out on optimisation of suitable carbon-based materials for use as the electron emitter source in such a system. From initial experiments on field emission from tetrahedrally bonded amorphous carbon (ta-C) and nanocluster carbon films, it has been deduced that emission occurs from nanometre-size sp2 sites within an insulating sp3 matrix. Hence, we have carried out a series of experiments to investigate the possibility of deliberately producing such sp2 regions within a predominantly sp3 matrix using e-beam irradiation, high energy ion beam irradiation and post deposition plasma processing of ta-C. Unfortunately, although the use of 1GeV uranium ions successfully produced arrays of sp2 rich regions on the required nanometre scale, no preferential field emission from such sites could be obtained. The final series of experiments were thence carried out using aligned carbon nanotubes (CNTs) as the electron sources. Results on aligned CNTs, grown using a dc plasma technique and a Ni catalyst, are presented. Both the diameter and length of the CNTs are dependent upon the thickness of the catalytic layer used. Field emission from an array of CNTs was obtained.
AB - The overall aim of this work is to produce a parallel e-beam lithography system using an array of field-emitting microguns independently driven by an active matrix array. This paper will describe the work carried out on optimisation of suitable carbon-based materials for use as the electron emitter source in such a system. From initial experiments on field emission from tetrahedrally bonded amorphous carbon (ta-C) and nanocluster carbon films, it has been deduced that emission occurs from nanometre-size sp2 sites within an insulating sp3 matrix. Hence, we have carried out a series of experiments to investigate the possibility of deliberately producing such sp2 regions within a predominantly sp3 matrix using e-beam irradiation, high energy ion beam irradiation and post deposition plasma processing of ta-C. Unfortunately, although the use of 1GeV uranium ions successfully produced arrays of sp2 rich regions on the required nanometre scale, no preferential field emission from such sites could be obtained. The final series of experiments were thence carried out using aligned carbon nanotubes (CNTs) as the electron sources. Results on aligned CNTs, grown using a dc plasma technique and a Ni catalyst, are presented. Both the diameter and length of the CNTs are dependent upon the thickness of the catalytic layer used. Field emission from an array of CNTs was obtained.
KW - Carbon nanotubes
KW - Diamond-like carbon
KW - Field emission
UR - http://www.scopus.com/inward/record.url?scp=0347866941&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0347866941&partnerID=8YFLogxK
M3 - Article
VL - 11
SP - 235
EP - 247
JO - New Diamond and Frontier Carbon Technology
JF - New Diamond and Frontier Carbon Technology
SN - 1344-9931
IS - 4
ER -