Carbon nanotube technology for solid state and vacuum electronics

K. B.K. Teo, R. G. Lacerda, M. H. Yang, A. S. Teh, L. A.W. Robinson, S. H. Dalal, N. L. Rupesinghe, M. Chhowalla, S. B. Lee, D. A. Jefferson, D. G. Hasko, G. A.J. Amaratunga, W. L. Milne, P. Legagneux, L. Gangloff, E. Minoux, J. P. Schnell, D. Pribat

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

The authors demonstrate the fabrication of solid state and vacuum electronic devices using carbon nanotubes as the active channel and emitters. Single wall and multiwall carbon nanotubes (CNT) are deposited directly on substrates using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD), respectively. The fabrication of top gate and side gate field effect transistors is demonstrated using single wall CNTs. Vertically aligned multiwall CNTs are used to fabricate field emitter arrays or micro-gated field emitters, which have potential application in field emission displays, microwave amplifiers or electron guns.

Original languageEnglish
Pages (from-to)443-451
Number of pages9
JournalIEE Proceedings: Circuits, Devices and Systems
Volume151
Issue number5
DOIs
Publication statusPublished - Oct 1 2004

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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