Carbon nanotube technology for solid state and vacuum electronics

K. B K Teo, R. G. Lacerda, M. H. Yang, A. S. Teh, L. A W Robinson, S. H. Dalal, N. L. Rupesinghe, Manish Chhowalla, S. B. Lee, D. A. Jefferson, D. G. Hasko, G. A J Amaratunga, W. L. Milne, P. Legagneux, L. Gangloff, E. Minoux, J. P. Schnell, D. Pribat

Research output: Chapter in Book/Report/Conference proceedingChapter

36 Citations (Scopus)

Abstract

The authors demonstrate the fabrication of solid state and vacuum electronic devices using carbon nanotubes as the active channel and emitters. Single wall and multiwall carbon nanotubes (CNT) are deposited directly on substrates using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD), respectively. The fabrication of top gate and side gate field effect transistors is demonstrated using single wall CNTs. Vertically aligned multiwall CNTs are used to fabricate field emitter arrays or micro-gated field emitters, which have potential application in field emission displays, microwave amplifiers or electron guns.

Original languageEnglish
Title of host publicationIEE Proceedings: Circuits, Devices and Systems
Pages443-451
Number of pages9
Volume151
Edition5
DOIs
Publication statusPublished - Oct 2004

Fingerprint

Carbon nanotubes
Electronic equipment
Vacuum
Field emission displays
Microwave amplifiers
Gates (transistor)
Fabrication
Electron guns
Plasma enhanced chemical vapor deposition
Chemical vapor deposition
Substrates

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Teo, K. B. K., Lacerda, R. G., Yang, M. H., Teh, A. S., Robinson, L. A. W., Dalal, S. H., ... Pribat, D. (2004). Carbon nanotube technology for solid state and vacuum electronics. In IEE Proceedings: Circuits, Devices and Systems (5 ed., Vol. 151, pp. 443-451) https://doi.org/10.1049/ip-cds:20040408

Carbon nanotube technology for solid state and vacuum electronics. / Teo, K. B K; Lacerda, R. G.; Yang, M. H.; Teh, A. S.; Robinson, L. A W; Dalal, S. H.; Rupesinghe, N. L.; Chhowalla, Manish; Lee, S. B.; Jefferson, D. A.; Hasko, D. G.; Amaratunga, G. A J; Milne, W. L.; Legagneux, P.; Gangloff, L.; Minoux, E.; Schnell, J. P.; Pribat, D.

IEE Proceedings: Circuits, Devices and Systems. Vol. 151 5. ed. 2004. p. 443-451.

Research output: Chapter in Book/Report/Conference proceedingChapter

Teo, KBK, Lacerda, RG, Yang, MH, Teh, AS, Robinson, LAW, Dalal, SH, Rupesinghe, NL, Chhowalla, M, Lee, SB, Jefferson, DA, Hasko, DG, Amaratunga, GAJ, Milne, WL, Legagneux, P, Gangloff, L, Minoux, E, Schnell, JP & Pribat, D 2004, Carbon nanotube technology for solid state and vacuum electronics. in IEE Proceedings: Circuits, Devices and Systems. 5 edn, vol. 151, pp. 443-451. https://doi.org/10.1049/ip-cds:20040408
Teo KBK, Lacerda RG, Yang MH, Teh AS, Robinson LAW, Dalal SH et al. Carbon nanotube technology for solid state and vacuum electronics. In IEE Proceedings: Circuits, Devices and Systems. 5 ed. Vol. 151. 2004. p. 443-451 https://doi.org/10.1049/ip-cds:20040408
Teo, K. B K ; Lacerda, R. G. ; Yang, M. H. ; Teh, A. S. ; Robinson, L. A W ; Dalal, S. H. ; Rupesinghe, N. L. ; Chhowalla, Manish ; Lee, S. B. ; Jefferson, D. A. ; Hasko, D. G. ; Amaratunga, G. A J ; Milne, W. L. ; Legagneux, P. ; Gangloff, L. ; Minoux, E. ; Schnell, J. P. ; Pribat, D. / Carbon nanotube technology for solid state and vacuum electronics. IEE Proceedings: Circuits, Devices and Systems. Vol. 151 5. ed. 2004. pp. 443-451
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