Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool

Jeffrey Camacho-Bunquin, Heng Shou, Payoli Aich, David R. Beaulieu, Helmut Klotzsch, Stephen Bachman, Christopher L. Marshall, Adam Hock, Peter C Stair

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

An integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool was developed. It combines an ALD manifold in-line with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT delivery system consists of 12 different metal ALD precursor channels, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10-3 to 1 bar and 300-1000 K, respectively. The instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the synthesis of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity.

Original languageEnglish
Article number084103
JournalReview of Scientific Instruments
Volume86
Issue number8
DOIs
Publication statusPublished - Aug 1 2015

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Atomic layer deposition
atomic layer epitaxy
Catalysis
catalysis
catalysts
Catalysts
evaluation
Testing
synthesis
reactors
plugs
Reducing agents
Mass spectrometers
propylene
Gases
mass spectrometers
Hydrogenation
hydrogenation
Propylene
Platinum

ASJC Scopus subject areas

  • Instrumentation

Cite this

Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool. / Camacho-Bunquin, Jeffrey; Shou, Heng; Aich, Payoli; Beaulieu, David R.; Klotzsch, Helmut; Bachman, Stephen; Marshall, Christopher L.; Hock, Adam; Stair, Peter C.

In: Review of Scientific Instruments, Vol. 86, No. 8, 084103, 01.08.2015.

Research output: Contribution to journalArticle

Camacho-Bunquin, J, Shou, H, Aich, P, Beaulieu, DR, Klotzsch, H, Bachman, S, Marshall, CL, Hock, A & Stair, PC 2015, 'Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool', Review of Scientific Instruments, vol. 86, no. 8, 084103. https://doi.org/10.1063/1.4928614
Camacho-Bunquin, Jeffrey ; Shou, Heng ; Aich, Payoli ; Beaulieu, David R. ; Klotzsch, Helmut ; Bachman, Stephen ; Marshall, Christopher L. ; Hock, Adam ; Stair, Peter C. / Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool. In: Review of Scientific Instruments. 2015 ; Vol. 86, No. 8.
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