Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters; Robert P. H. Chang; C. J. Mogab; John Evans; John A. Thornton; Hirotsugu Yasuda

doi:10.1016/0025-5416(85)90268-X

Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters, Robert P. H. Chang, C. J. Mogab, John Evans, John A. Thornton, Hirotsugu Yasuda

Northwestern University

Research output: Contribution to journal › Article

24 Citations (Scopus)

Original language	English
Pages (from-to)	53-77
Number of pages	25
Journal	Materials Science and Engineering
Volume	70
Issue number	C
DOIs	https://doi.org/10.1016/0025-5416(85)90268-X
Publication status	Published - 1985

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1016/0025-5416(85)90268-X

Cite this

Winters, H. F., Chang, R. P. H., Mogab, C. J., Evans, J., Thornton, J. A., & Yasuda, H. (1985). Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas. Materials Science and Engineering, 70(C), 53-77. https://doi.org/10.1016/0025-5416(85)90268-X

@article{2b038d0b0a344cf1ac8e178f1b2913ea,

title = "Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas",

author = "Winters, {Harold F.} and Chang, {Robert P. H.} and Mogab, {C. J.} and John Evans and Thornton, {John A.} and Hirotsugu Yasuda",

year = "1985",

doi = "10.1016/0025-5416(85)90268-X",

language = "English",

volume = "70",

pages = "53--77",

journal = "Materials Science and Engineering",

issn = "0025-5416",

publisher = "Elsevier BV",

number = "C",

}

TY - JOUR

T1 - Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

AU - Winters, Harold F.

AU - Chang, Robert P. H.

AU - Mogab, C. J.

AU - Evans, John

AU - Thornton, John A.

AU - Yasuda, Hirotsugu

PY - 1985

Y1 - 1985

UR - http://www.scopus.com/inward/record.url?scp=0022043043&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0022043043&partnerID=8YFLogxK

U2 - 10.1016/0025-5416(85)90268-X

DO - 10.1016/0025-5416(85)90268-X

M3 - Article

AN - SCOPUS:0022043043

VL - 70

SP - 53

EP - 77

JO - Materials Science and Engineering

JF - Materials Science and Engineering

SN - 0025-5416

IS - C

ER -