Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters; Robert P. H. Chang; C. J. Mogab; John Evans; John A. Thornton; Hirotsugu Yasuda

doi:10.1016/0025-5416(85)90268-X

Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters, Robert P. H. Chang, C. J. Mogab, John Evans, John A. Thornton, Hirotsugu Yasuda

Northwestern University

Research output: Contribution to journal › Article

23 Citations (Scopus)

Original language	English
Pages (from-to)	53-77
Number of pages	25
Journal	Materials Science and Engineering
Volume	70
Issue number	C
DOIs	https://doi.org/10.1016/0025-5416(85)90268-X
Publication status	Published - 1985

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ASJC Scopus subject areas

Engineering(all)

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Winters, H. F., Chang, R. P. H., Mogab, C. J., Evans, J., Thornton, J. A., & Yasuda, H. (1985). Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas. Materials Science and Engineering, 70(C), 53-77. https://doi.org/10.1016/0025-5416(85)90268-X

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10.1016/0025-5416(85)90268-X