Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters, Robert P. H. Chang, C. J. Mogab, John Evans, John A. Thornton, Hirotsugu Yasuda

Research output: Contribution to journal › Article

23 Citations (Scopus)
Original languageEnglish
Pages (from-to)53-77
Number of pages25
JournalMaterials Science and Engineering
Volume70
Issue numberC
DOIs
Publication statusPublished - 1985

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Coating techniques
Sputtering
Surface treatment
Etching
Plasmas
Coatings

ASJC Scopus subject areas

  • Engineering(all)

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Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas. / Winters, Harold F.; Chang, Robert P. H.; Mogab, C. J.; Evans, John; Thornton, John A.; Yasuda, Hirotsugu.

In: Materials Science and Engineering, Vol. 70, No. C, 1985, p. 53-77.

Research output: Contribution to journal › Article

Winters, HF, Chang, RPH, Mogab, CJ, Evans, J, Thornton, JA & Yasuda, H 1985, 'Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas', Materials Science and Engineering, vol. 70, no. C, pp. 53-77. https://doi.org/10.1016/0025-5416(85)90268-X
Winters HF, Chang RPH, Mogab CJ, Evans J, Thornton JA, Yasuda H. Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas. Materials Science and Engineering. 1985;70(C):53-77. https://doi.org/10.1016/0025-5416(85)90268-X
Winters, Harold F. ; Chang, Robert P. H. ; Mogab, C. J. ; Evans, John ; Thornton, John A. ; Yasuda, Hirotsugu. / Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas. In: Materials Science and Engineering. 1985 ; Vol. 70, No. C. pp. 53-77.
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