Chapter 3 Coatings and surface modification using low pressure non-equilibrium plasmas

Harold F. Winters, Robert P. H. Chang, C. J. Mogab, John Evans, John A. Thornton, Hirotsugu Yasuda

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)
Original languageEnglish
Pages (from-to)53-77
Number of pages25
JournalMaterials Science and Engineering
Issue numberC
Publication statusPublished - 1985

ASJC Scopus subject areas

  • Engineering(all)

Cite this