Characterization of plasma-enhanced chemical vapor deposition carbon nanotubes by Auger electron spectroscopy

K. B K Teo, Manish Chhowalla, G. A J Amaratunga, W. I. Milne, G. Pirio, P. Legagneux, F. Wyczisk, J. Olivier, D. Pribat

Research output: Contribution to journalArticle

76 Citations (Scopus)

Abstract

The characterization of plasma enhanced chemical vapor deposition (PECVD) deposited nanotubes using Auger Electron Spectroscopy (AES) was presented. The grown nanotubes followed a tip-growth mechanism with a high degree of crystallinity detected in the bodies and same in the heads. By adjusting the deposition gas ratios, it was shown that it was possible to eliminate the unwanted amorphous carbon on the substrate surface.

Original languageEnglish
Pages (from-to)116-121
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number1
DOIs
Publication statusPublished - Jan 2002

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Auger electron spectroscopy
Plasma enhanced chemical vapor deposition
Nanotubes
Auger spectroscopy
electron spectroscopy
Carbon nanotubes
nanotubes
carbon nanotubes
vapor deposition
Amorphous carbon
crystallinity
adjusting
carbon
Substrates
Gases
gases

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Characterization of plasma-enhanced chemical vapor deposition carbon nanotubes by Auger electron spectroscopy. / Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Pirio, G.; Legagneux, P.; Wyczisk, F.; Olivier, J.; Pribat, D.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 20, No. 1, 01.2002, p. 116-121.

Research output: Contribution to journalArticle

Teo, K. B K ; Chhowalla, Manish ; Amaratunga, G. A J ; Milne, W. I. ; Pirio, G. ; Legagneux, P. ; Wyczisk, F. ; Olivier, J. ; Pribat, D. / Characterization of plasma-enhanced chemical vapor deposition carbon nanotubes by Auger electron spectroscopy. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2002 ; Vol. 20, No. 1. pp. 116-121.
@article{4f64a916d0e3425787d3574f25abae64,
title = "Characterization of plasma-enhanced chemical vapor deposition carbon nanotubes by Auger electron spectroscopy",
abstract = "The characterization of plasma enhanced chemical vapor deposition (PECVD) deposited nanotubes using Auger Electron Spectroscopy (AES) was presented. The grown nanotubes followed a tip-growth mechanism with a high degree of crystallinity detected in the bodies and same in the heads. By adjusting the deposition gas ratios, it was shown that it was possible to eliminate the unwanted amorphous carbon on the substrate surface.",
author = "Teo, {K. B K} and Manish Chhowalla and Amaratunga, {G. A J} and Milne, {W. I.} and G. Pirio and P. Legagneux and F. Wyczisk and J. Olivier and D. Pribat",
year = "2002",
month = "1",
doi = "10.1116/1.1428281",
language = "English",
volume = "20",
pages = "116--121",
journal = "Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "1",

}

TY - JOUR

T1 - Characterization of plasma-enhanced chemical vapor deposition carbon nanotubes by Auger electron spectroscopy

AU - Teo, K. B K

AU - Chhowalla, Manish

AU - Amaratunga, G. A J

AU - Milne, W. I.

AU - Pirio, G.

AU - Legagneux, P.

AU - Wyczisk, F.

AU - Olivier, J.

AU - Pribat, D.

PY - 2002/1

Y1 - 2002/1

N2 - The characterization of plasma enhanced chemical vapor deposition (PECVD) deposited nanotubes using Auger Electron Spectroscopy (AES) was presented. The grown nanotubes followed a tip-growth mechanism with a high degree of crystallinity detected in the bodies and same in the heads. By adjusting the deposition gas ratios, it was shown that it was possible to eliminate the unwanted amorphous carbon on the substrate surface.

AB - The characterization of plasma enhanced chemical vapor deposition (PECVD) deposited nanotubes using Auger Electron Spectroscopy (AES) was presented. The grown nanotubes followed a tip-growth mechanism with a high degree of crystallinity detected in the bodies and same in the heads. By adjusting the deposition gas ratios, it was shown that it was possible to eliminate the unwanted amorphous carbon on the substrate surface.

UR - http://www.scopus.com/inward/record.url?scp=0036118721&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036118721&partnerID=8YFLogxK

U2 - 10.1116/1.1428281

DO - 10.1116/1.1428281

M3 - Article

AN - SCOPUS:0036118721

VL - 20

SP - 116

EP - 121

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 1071-1023

IS - 1

ER -