Charge transport and optical properties of MOCVD-derived highly transparent and conductive Mg- and Sn-doped In2O3 thin films

Jun Ni, Lian Wang, Yu Yang, He Yan, Shu Jin, Tobin J Marks, John R. Ireland, Carl R. Kannewurf

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Mg- and Sn-doped In2O3 (MgInxSn yOz, 6.0 <x <16.0; 3.0 <y <8.0) thin films were grown by low-pressure metal-organic chemical vapor deposition using the volatile metal-organic precursors tris(2,2,6,6-tetramethyl-3,5-heptanedionato) indium(III) [In(dpm)3], bis(2,4-pentanedionato)tin(II) [Sn(acac) 2], and bis(2,2,6,6-tetramethyl-3,5-heptanedionato)(N,N,N′, N′-tetramethylethylenediamine)magnesium(II) [Mg(dpm)2(TMEDA)]. Films in this compositional range retain the cubic In2O3 bixbyite crystal structure. The highest conductivity is found to be ∼1000 S/cm for an as-grown film with a nominal composition MgIn14.3Sn 6.93Oz. Annealing of such films in a vacuum raises the conductivity to ∼2000 S/cm. The optical transmission window of the present films is significantly wider than that of typical indium tin oxide (ITO) films from 300 to 3300 nm, and the transmittance is also greater than or comparable to that of commercial ITO films.

Original languageEnglish
Pages (from-to)6071-6076
Number of pages6
JournalInorganic Chemistry
Volume44
Issue number17
DOIs
Publication statusPublished - Aug 22 2005

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Metallorganic chemical vapor deposition
Transport properties
metalorganic chemical vapor deposition
Charge transfer
Optical properties
transport properties
optical properties
Thin films
thin films
indium oxides
tin oxides
Oxide films
oxide films
Metals
Organic Chemicals
conductivity
Indium
Tin
Light transmission
Magnesium

ASJC Scopus subject areas

  • Inorganic Chemistry

Cite this

Charge transport and optical properties of MOCVD-derived highly transparent and conductive Mg- and Sn-doped In2O3 thin films. / Ni, Jun; Wang, Lian; Yang, Yu; Yan, He; Jin, Shu; Marks, Tobin J; Ireland, John R.; Kannewurf, Carl R.

In: Inorganic Chemistry, Vol. 44, No. 17, 22.08.2005, p. 6071-6076.

Research output: Contribution to journalArticle

Ni, Jun ; Wang, Lian ; Yang, Yu ; Yan, He ; Jin, Shu ; Marks, Tobin J ; Ireland, John R. ; Kannewurf, Carl R. / Charge transport and optical properties of MOCVD-derived highly transparent and conductive Mg- and Sn-doped In2O3 thin films. In: Inorganic Chemistry. 2005 ; Vol. 44, No. 17. pp. 6071-6076.
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