Chemical and structural investigation of high-resolution patterning with HafSOx

Richard P. Oleksak, Rose E. Ruther, Feixiang Luo, Kurtis C. Fairley, Shawn R. Decker, William F. Stickle, Darren W. Johnson, Eric L. Garfunkel, Gregory S. Herman, Douglas A. Keszler

Research output: Contribution to journalArticlepeer-review

56 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science