Chemical vapor deposition of monolayer MoS2 directly on ultrathin Al2O3 for low-power electronics

Hadallia Bergeron, Vinod K. Sangwan, Julian J. McMorrow, Gavin P. Campbell, Itamar Balla, Xiaolong Liu, Michael J. Bedzyk, Tobin J Marks, Mark C Hersam

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

Monolayer MoS2 has recently been identified as a promising material for high-performance electronics. However, monolayer MoS2 must be integrated with ultrathin high-κ gate dielectrics in order to realize practical low-power devices. In this letter, we report the chemical vapor deposition (CVD) of monolayer MoS2 directly on 20 nm thick Al2O3 grown by atomic layer deposition (ALD). The quality of the resulting MoS2 is characterized by a comprehensive set of microscopic and spectroscopic techniques. Furthermore, a low-temperature (200 °C) Al2O3 ALD process is developed that maintains dielectric integrity following the high-temperature CVD of MoS2 (800 °C). Field-effect transistors (FETs) derived from these MoS2/Al2O3 stacks show minimal hysteresis with a sub-threshold swing as low as ∼220 mV/decade, threshold voltages of ∼2 V, and current ION/IOFF ratio as high as ∼104, where IOFF is defined as the current at zero gate voltage as is customary for determining power consumption in complementary logic circuits. The system presented here concurrently optimizes multiple low-power electronics figures of merit while providing a transfer-free method of integrating monolayer MoS2 with ultrathin high-κ dielectrics, thus enabling a scalable pathway for enhancement-mode FETs for low-power applications.

Original languageEnglish
Article number053101
JournalApplied Physics Letters
Volume110
Issue number5
DOIs
Publication statusPublished - Jan 30 2017

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vapor deposition
atomic layer epitaxy
field effect transistors
electronics
logic circuits
figure of merit
threshold voltage
integrity
hysteresis
thresholds
augmentation
electric potential

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Chemical vapor deposition of monolayer MoS2 directly on ultrathin Al2O3 for low-power electronics. / Bergeron, Hadallia; Sangwan, Vinod K.; McMorrow, Julian J.; Campbell, Gavin P.; Balla, Itamar; Liu, Xiaolong; Bedzyk, Michael J.; Marks, Tobin J; Hersam, Mark C.

In: Applied Physics Letters, Vol. 110, No. 5, 053101, 30.01.2017.

Research output: Contribution to journalArticle

Bergeron, H, Sangwan, VK, McMorrow, JJ, Campbell, GP, Balla, I, Liu, X, Bedzyk, MJ, Marks, TJ & Hersam, MC 2017, 'Chemical vapor deposition of monolayer MoS2 directly on ultrathin Al2O3 for low-power electronics', Applied Physics Letters, vol. 110, no. 5, 053101. https://doi.org/10.1063/1.4975064
Bergeron H, Sangwan VK, McMorrow JJ, Campbell GP, Balla I, Liu X et al. Chemical vapor deposition of monolayer MoS2 directly on ultrathin Al2O3 for low-power electronics. Applied Physics Letters. 2017 Jan 30;110(5). 053101. https://doi.org/10.1063/1.4975064
Bergeron, Hadallia ; Sangwan, Vinod K. ; McMorrow, Julian J. ; Campbell, Gavin P. ; Balla, Itamar ; Liu, Xiaolong ; Bedzyk, Michael J. ; Marks, Tobin J ; Hersam, Mark C. / Chemical vapor deposition of monolayer MoS2 directly on ultrathin Al2O3 for low-power electronics. In: Applied Physics Letters. 2017 ; Vol. 110, No. 5.
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