Chemically amplified dehydration of thin oxide films

Jeremy T. Anderson, Wei Wang, Kai Jiang, Torgny Gustafsson, Can Xu, Eric Garfunkel, Douglas A. Keszler

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10 Citations (Scopus)

Abstract

The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

Original languageEnglish
Pages (from-to)1081-1085
Number of pages5
JournalACS Sustainable Chemistry and Engineering
Volume3
Issue number6
DOIs
Publication statusPublished - Jun 1 2015

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Keywords

  • Aqueous processing
  • Electronic materials
  • Oxide films

ASJC Scopus subject areas

  • Chemistry(all)
  • Environmental Chemistry
  • Chemical Engineering(all)
  • Renewable Energy, Sustainability and the Environment

Cite this

Anderson, J. T., Wang, W., Jiang, K., Gustafsson, T., Xu, C., Garfunkel, E., & Keszler, D. A. (2015). Chemically amplified dehydration of thin oxide films. ACS Sustainable Chemistry and Engineering, 3(6), 1081-1085. https://doi.org/10.1021/sc500824a