Chemically amplified dehydration of thin oxide films

Jeremy T. Anderson; Wei Wang; Kai Jiang; Torgny Gustafsson; Can Xu; Eric Garfunkel; Douglas A. Keszler

doi:10.1021/sc500824a

Chemically amplified dehydration of thin oxide films

Jeremy T. Anderson, Wei Wang, Kai Jiang, Torgny Gustafsson, Can Xu, Eric Garfunkel, Douglas A. Keszler

Rutgers University

Research output: Contribution to journal › Article

10 Citations (Scopus)

Abstract

The hydrous material Al(PO₄)_0.6O_0.6·zH₂O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H₂O in the films. Deposition of a thin solution-processed HfO₂ top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO₂ interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

Original language	English
Pages (from-to)	1081-1085
Number of pages	5
Journal	ACS Sustainable Chemistry and Engineering
Volume	3
Issue number	6
DOIs	https://doi.org/10.1021/sc500824a
Publication status	Published - Jun 1 2015

Fingerprint

Keywords

Aqueous processing
Electronic materials
Oxide films

ASJC Scopus subject areas

Chemistry(all)
Environmental Chemistry
Chemical Engineering(all)
Renewable Energy, Sustainability and the Environment

Cite this

Anderson, J. T., Wang, W., Jiang, K., Gustafsson, T., Xu, C., Garfunkel, E., & Keszler, D. A. (2015). Chemically amplified dehydration of thin oxide films. ACS Sustainable Chemistry and Engineering, 3(6), 1081-1085. https://doi.org/10.1021/sc500824a

@article{adfb4898dd5c4d27a942878fe12dfbca,

title = "Chemically amplified dehydration of thin oxide films",

abstract = "The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.",

keywords = "Aqueous processing, Electronic materials, Oxide films",

author = "Anderson, {Jeremy T.} and Wei Wang and Kai Jiang and Torgny Gustafsson and Can Xu and Eric Garfunkel and Keszler, {Douglas A.}",

year = "2015",

month = "6",

day = "1",

doi = "10.1021/sc500824a",

language = "English",

volume = "3",

pages = "1081--1085",

journal = "ACS Sustainable Chemistry and Engineering",

issn = "2168-0485",

publisher = "American Chemical Society",

number = "6",

}

TY - JOUR

T1 - Chemically amplified dehydration of thin oxide films

AU - Anderson, Jeremy T.

AU - Wang, Wei

AU - Jiang, Kai

AU - Gustafsson, Torgny

AU - Xu, Can

AU - Garfunkel, Eric

AU - Keszler, Douglas A.

PY - 2015/6/1

Y1 - 2015/6/1

N2 - The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

AB - The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

KW - Aqueous processing

KW - Electronic materials

KW - Oxide films

UR - http://www.scopus.com/inward/record.url?scp=84930619361&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84930619361&partnerID=8YFLogxK

U2 - 10.1021/sc500824a

DO - 10.1021/sc500824a

M3 - Article

AN - SCOPUS:84930619361

VL - 3

SP - 1081

EP - 1085

JO - ACS Sustainable Chemistry and Engineering

JF - ACS Sustainable Chemistry and Engineering

SN - 2168-0485

IS - 6

ER -

Access to Document

10.1021/sc500824a