Chemically amplified dehydration of thin oxide films

Jeremy T. Anderson, Wei Wang, Kai Jiang, Torgny Gustafsson, Can Xu, Eric Garfunkel, Douglas A. Keszler

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

Original languageEnglish
Pages (from-to)1081-1085
Number of pages5
JournalACS Sustainable Chemistry and Engineering
Volume3
Issue number6
DOIs
Publication statusPublished - Jun 1 2015

Fingerprint

Dehydration
dehydration
Oxide films
oxide
Thin films
Densification
Capacitance measurement
Voltage measurement
Protons
reflectivity
Scattering
Ions
transmission electron microscopy
Transmission electron microscopy
Heating
X rays
Temperature
scattering
Water
crust

Keywords

  • Aqueous processing
  • Electronic materials
  • Oxide films

ASJC Scopus subject areas

  • Chemistry(all)
  • Environmental Chemistry
  • Chemical Engineering(all)
  • Renewable Energy, Sustainability and the Environment

Cite this

Anderson, J. T., Wang, W., Jiang, K., Gustafsson, T., Xu, C., Garfunkel, E., & Keszler, D. A. (2015). Chemically amplified dehydration of thin oxide films. ACS Sustainable Chemistry and Engineering, 3(6), 1081-1085. https://doi.org/10.1021/sc500824a

Chemically amplified dehydration of thin oxide films. / Anderson, Jeremy T.; Wang, Wei; Jiang, Kai; Gustafsson, Torgny; Xu, Can; Garfunkel, Eric; Keszler, Douglas A.

In: ACS Sustainable Chemistry and Engineering, Vol. 3, No. 6, 01.06.2015, p. 1081-1085.

Research output: Contribution to journalArticle

Anderson, JT, Wang, W, Jiang, K, Gustafsson, T, Xu, C, Garfunkel, E & Keszler, DA 2015, 'Chemically amplified dehydration of thin oxide films', ACS Sustainable Chemistry and Engineering, vol. 3, no. 6, pp. 1081-1085. https://doi.org/10.1021/sc500824a
Anderson, Jeremy T. ; Wang, Wei ; Jiang, Kai ; Gustafsson, Torgny ; Xu, Can ; Garfunkel, Eric ; Keszler, Douglas A. / Chemically amplified dehydration of thin oxide films. In: ACS Sustainable Chemistry and Engineering. 2015 ; Vol. 3, No. 6. pp. 1081-1085.
@article{adfb4898dd5c4d27a942878fe12dfbca,
title = "Chemically amplified dehydration of thin oxide films",
abstract = "The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.",
keywords = "Aqueous processing, Electronic materials, Oxide films",
author = "Anderson, {Jeremy T.} and Wei Wang and Kai Jiang and Torgny Gustafsson and Can Xu and Eric Garfunkel and Keszler, {Douglas A.}",
year = "2015",
month = "6",
day = "1",
doi = "10.1021/sc500824a",
language = "English",
volume = "3",
pages = "1081--1085",
journal = "ACS Sustainable Chemistry and Engineering",
issn = "2168-0485",
publisher = "American Chemical Society",
number = "6",

}

TY - JOUR

T1 - Chemically amplified dehydration of thin oxide films

AU - Anderson, Jeremy T.

AU - Wang, Wei

AU - Jiang, Kai

AU - Gustafsson, Torgny

AU - Xu, Can

AU - Garfunkel, Eric

AU - Keszler, Douglas A.

PY - 2015/6/1

Y1 - 2015/6/1

N2 - The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

AB - The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

KW - Aqueous processing

KW - Electronic materials

KW - Oxide films

UR - http://www.scopus.com/inward/record.url?scp=84930619361&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84930619361&partnerID=8YFLogxK

U2 - 10.1021/sc500824a

DO - 10.1021/sc500824a

M3 - Article

AN - SCOPUS:84930619361

VL - 3

SP - 1081

EP - 1085

JO - ACS Sustainable Chemistry and Engineering

JF - ACS Sustainable Chemistry and Engineering

SN - 2168-0485

IS - 6

ER -