Chemically amplified dehydration of thin oxide films

Jeremy T. Anderson, Wei Wang, Kai Jiang, Torgny Gustafsson, Can Xu, Eric L. Gafunkel, Douglas A. Keszler

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.

Original languageEnglish
Pages (from-to)1081-1085
Number of pages5
JournalACS Sustainable Chemistry and Engineering
Issue number6
Publication statusPublished - Jun 1 2015


  • Aqueous processing
  • Electronic materials
  • Oxide films

ASJC Scopus subject areas

  • Chemistry(all)
  • Environmental Chemistry
  • Chemical Engineering(all)
  • Renewable Energy, Sustainability and the Environment

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