Abstract
The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.
| Original language | English |
|---|---|
| Pages (from-to) | 1081-1085 |
| Number of pages | 5 |
| Journal | ACS Sustainable Chemistry and Engineering |
| Volume | 3 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Jun 1 2015 |
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Keywords
- Aqueous processing
- Electronic materials
- Oxide films
ASJC Scopus subject areas
- Chemistry(all)
- Environmental Chemistry
- Chemical Engineering(all)
- Renewable Energy, Sustainability and the Environment
Cite this
Chemically amplified dehydration of thin oxide films. / Anderson, Jeremy T.; Wang, Wei; Jiang, Kai; Gustafsson, Torgny; Xu, Can; Garfunkel, Eric; Keszler, Douglas A.
In: ACS Sustainable Chemistry and Engineering, Vol. 3, No. 6, 01.06.2015, p. 1081-1085.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Chemically amplified dehydration of thin oxide films
AU - Anderson, Jeremy T.
AU - Wang, Wei
AU - Jiang, Kai
AU - Gustafsson, Torgny
AU - Xu, Can
AU - Garfunkel, Eric
AU - Keszler, Douglas A.
PY - 2015/6/1
Y1 - 2015/6/1
N2 - The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.
AB - The hydrous material Al(PO4)0.6O0.6·zH2O (AlPO) is studied in thin-film form to determine whether bulk diffusion or near-surface densification controls thermal dehydration. From X-ray reflectivity measurements, a dense surface crust is found to form on heating AlPO films. Capacitance-voltage measurements reveal the presence of mobile protons associated with trapped OH and H2O in the films. Deposition of a thin solution-processed HfO2 top coat on the AlPO film lowers the dehydration temperature by 250 °C. Characterization of the AlPO/HfO2 interface by medium energy ion scattering and transmission electron microscopy reveals little interdiffusion between the layers. The top coat affects densification of the near-surface region of the AlPO film, thereby amplifying water loss at low temperatures.
KW - Aqueous processing
KW - Electronic materials
KW - Oxide films
UR - http://www.scopus.com/inward/record.url?scp=84930619361&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84930619361&partnerID=8YFLogxK
U2 - 10.1021/sc500824a
DO - 10.1021/sc500824a
M3 - Article
AN - SCOPUS:84930619361
VL - 3
SP - 1081
EP - 1085
JO - ACS Sustainable Chemistry and Engineering
JF - ACS Sustainable Chemistry and Engineering
SN - 2168-0485
IS - 6
ER -