Abstract
High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.
Original language | English |
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Pages (from-to) | 211-230 |
Number of pages | 20 |
Journal | Applications of Surface Science |
Volume | 13 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 1982 |
ASJC Scopus subject areas
- Engineering(all)