Abstract
High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.
| Original language | English |
|---|---|
| Pages (from-to) | 211-230 |
| Number of pages | 20 |
| Journal | Applications of Surface Science |
| Volume | 13 |
| Issue number | 1-2 |
| DOIs | |
| Publication status | Published - 1982 |
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Comparison of high energy ion beam and electron beam surface probes. / Feldman, Leonard C.
In: Applications of Surface Science, Vol. 13, No. 1-2, 1982, p. 211-230.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Comparison of high energy ion beam and electron beam surface probes
AU - Feldman, Leonard C
PY - 1982
Y1 - 1982
N2 - High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.
AB - High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.
UR - http://www.scopus.com/inward/record.url?scp=0019601067&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0019601067&partnerID=8YFLogxK
U2 - 10.1016/0378-5963(82)90028-9
DO - 10.1016/0378-5963(82)90028-9
M3 - Article
VL - 13
SP - 211
EP - 230
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 1-2
ER -