Comparison of high energy ion beam and electron beam surface probes

Leonard C Feldman

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.

Original languageEnglish
Pages (from-to)211-230
Number of pages20
JournalApplications of Surface Science
Volume13
Issue number1-2
DOIs
Publication statusPublished - 1982

ASJC Scopus subject areas

  • Engineering(all)

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