Comparison of high energy ion beam and electron beam surface probes

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High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.

Original languageEnglish
Pages (from-to)211-230
Number of pages20
JournalApplications of Surface Science
Issue number1-2
Publication statusPublished - 1982


ASJC Scopus subject areas

  • Engineering(all)

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