Comparison of high energy ion beam and electron beam surface probes

Leonard C Feldman

doi:10.1016/0378-5963(82)90028-9

Comparison of high energy ion beam and electron beam surface probes

Leonard C Feldman

Rutgers University

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.

Original language	English
Pages (from-to)	211-230
Number of pages	20
Journal	Applications of Surface Science
Volume	13
Issue number	1-2
DOIs	https://doi.org/10.1016/0378-5963(82)90028-9
Publication status	Published - 1982

ASJC Scopus subject areas

Engineering(all)

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title = "Comparison of high energy ion beam and electron beam surface probes",

abstract = "High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.",

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PY - 1982

Y1 - 1982

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Comparison of high energy ion beam and electron beam surface probes

Abstract

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