Comparison of high energy ion beam and electron beam surface probes

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

High energy ion scattering has emerged as a surface composition and structure analysis tool. This paper describes the fundamental concepts used in ion scattering analysis of surfaces and compares recent results to that of electron beam (low energy electron diffraction and Auger analysis) surface probes.

Original languageEnglish
Pages (from-to)211-230
Number of pages20
JournalApplications of Surface Science
Volume13
Issue number1-2
DOIs
Publication statusPublished - 1982

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Surface structure
Ion beams
Electron beams
Scattering
Ions
Low energy electron diffraction
Surface analysis

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Comparison of high energy ion beam and electron beam surface probes. / Feldman, Leonard C.

In: Applications of Surface Science, Vol. 13, No. 1-2, 1982, p. 211-230.

Research output: Contribution to journalArticle

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