Complex electrical (impedance/dielectric) properties of electroceramic thin films by impedance spectroscopy with interdigital electrodes

N. J. Kidner, A. Meier, Z. J. Homrighaus, B. W. Wessels, T. O. Mason, E. J. Garboczi

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The complex electrical properties of isotropic, electroceramic thin films can be measured with interdigital electrodes, analyzed by impedance spectroscopy (IS). A periodic two-dimensional film/interdigital electrode (IDE) structure was simulated by finite-difference numerical method and a generalized model was developed to characterize the electrical properties of thin films. Variable frequency simulations showed that the film/IDE system can be modeled as a parallel resistor-capacitor equivalent circuit. Equations were developed to extract from the equivalent circuit's fitted resistance and capacitance, the materials properties of the thin film, both conductivity and permittivity. The electrical properties of a polydomain BaTiO3 film grown on a MgO substrate were measured with an IDE structure by IS to demonstrate how the methodology can be readily used.

Original languageEnglish
Pages (from-to)4588-4595
Number of pages8
JournalThin Solid Films
Issue number11
Publication statusPublished - Apr 9 2007



  • Barium titanate films
  • Farnell
  • Impedance spectroscopy
  • Interdigital electrodes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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