Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions

Justice M P Alaboson, Qing Hua Wang, Joshua A. Kellar, Joohee Park, Jeffrey W. Elam, Michael J. Pellin, Mark C Hersam

Research output: Contribution to journal › Article

28 Citations (Scopus)

Abstract

Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.

Original languageEnglish
Pages (from-to)2181-2184
Number of pages4
JournalAdvanced Materials
Volume23
Issue number19
DOIs
Publication statusPublished - May 17 2011

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Keywords

  • epitaxial graphene
  • lithography
  • nanopatterning
  • scanning probe microscopy
  • silicon carbide

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions. / Alaboson, Justice M P; Wang, Qing Hua; Kellar, Joshua A.; Park, Joohee; Elam, Jeffrey W.; Pellin, Michael J.; Hersam, Mark C.

In: Advanced Materials, Vol. 23, No. 19, 17.05.2011, p. 2181-2184.

Research output: Contribution to journal › Article

Alaboson, JMP, Wang, QH, Kellar, JA, Park, J, Elam, JW, Pellin, MJ & Hersam, MC 2011, 'Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions', Advanced Materials, vol. 23, no. 19, pp. 2181-2184. https://doi.org/10.1002/adma.201100367
Alaboson JMP, Wang QH, Kellar JA, Park J, Elam JW, Pellin MJ et al. Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions. Advanced Materials. 2011 May 17;23(19):2181-2184. https://doi.org/10.1002/adma.201100367
Alaboson, Justice M P ; Wang, Qing Hua ; Kellar, Joshua A. ; Park, Joohee ; Elam, Jeffrey W. ; Pellin, Michael J. ; Hersam, Mark C. / Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions. In: Advanced Materials. 2011 ; Vol. 23, No. 19. pp. 2181-2184.
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