Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions

Justice M.P. Alaboson; Qing Hua Wang; Joshua A. Kellar; Joohee Park; Jeffrey W. Elam; Michael J. Pellin; Mark C. Hersam

doi:10.1002/adma.201100367

Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions

Justice M.P. Alaboson, Qing Hua Wang, Joshua A. Kellar, Joohee Park, Jeffrey W. Elam, Michael J. Pellin, Mark C. Hersam

Northwestern University

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.

Original language	English
Pages (from-to)	2181-2184
Number of pages	4
Journal	Advanced Materials
Volume	23
Issue number	19
DOIs	https://doi.org/10.1002/adma.201100367
Publication status	Published - May 17 2011

Keywords

epitaxial graphene
lithography
nanopatterning
scanning probe microscopy
silicon carbide

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.201100367

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Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions. / Alaboson, Justice M.P.; Wang, Qing Hua; Kellar, Joshua A.; Park, Joohee; Elam, Jeffrey W.; Pellin, Michael J.; Hersam, Mark C.

In: Advanced Materials, Vol. 23, No. 19, 17.05.2011, p. 2181-2184.

Research output: Contribution to journal › Article › peer-review

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AU - Park, Joohee

AU - Elam, Jeffrey W.

AU - Pellin, Michael J.

AU - Hersam, Mark C.

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KW - nanopatterning

KW - scanning probe microscopy

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Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions

Abstract

Keywords

ASJC Scopus subject areas

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