Abstract
Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.
| Original language | English |
|---|---|
| Pages (from-to) | 2181-2184 |
| Number of pages | 4 |
| Journal | Advanced Materials |
| Volume | 23 |
| Issue number | 19 |
| DOIs | |
| Publication status | Published - May 17 2011 |
Keywords
- epitaxial graphene
- lithography
- nanopatterning
- scanning probe microscopy
- silicon carbide
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
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Cite this
Alaboson, J. M. P., Wang, Q. H., Kellar, J. A., Park, J., Elam, J. W., Pellin, M. J., & Hersam, M. C. (2011). Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions. Advanced Materials, 23(19), 2181-2184. https://doi.org/10.1002/adma.201100367