Conductive atomic force microscope nanopatterning of epitaxial graphene on SiC(0001) in ambient conditions

Justice M.P. Alaboson, Qing Hua Wang, Joshua A. Kellar, Joohee Park, Jeffrey W. Elam, Michael J. Pellin, Mark C. Hersam

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.

Original languageEnglish
Pages (from-to)2181-2184
Number of pages4
JournalAdvanced Materials
Volume23
Issue number19
DOIs
Publication statusPublished - May 17 2011

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Keywords

  • epitaxial graphene
  • lithography
  • nanopatterning
  • scanning probe microscopy
  • silicon carbide

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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