Abstract
Pt nanoparticles were successfully deposited using three different atomic layer deposition (ALD) methods, e.g. AB-type, ABC-type and static ABC-type ALD, on two different types of strontium titanate nanocuboids (STO-NCs) samples in a reaction temperature window of 125 °C-300 °C. The influence of reaction temperature, number of ALD cycles, type of substrate, 2nd reagent and type of ALD method on Pt nanoparticle deposition are comprehensively studied and discussed in this work. Varying the reaction temperature and number of cycles across the three different ALD methods affects Pt particle size, density, and loading. Surface termination of STO-NCs substrate will change deposited Pt nanoparticle growth orientation and thermodynamic shape. The B reagent besides platinum precursor can lead to different ligand decomposition mechanism when Pt precursors are exposed: oxygen allows more effective ligand combustion compared to water, however, the Pt particles are more oxidized according to XPS studies. We expect this work provides a way for tailoring nanoparticles with desired size, dispersion, exposed surfaces and chemical state etc, which helps controlling and optimizing their performance when applied as catalysts or nanosensors.
| Original language | English |
|---|---|
| Article number | 415301 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 50 |
| Issue number | 41 |
| DOIs | |
| Publication status | Published - Sep 15 2017 |
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Keywords
- atomic layer deposition
- nanoparticles, platinum
- TEM
- XPS
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films
Cite this
Controllable ALD synthesis of platinum nanoparticles by tuning different synthesis parameters. / Wang, Chuandao; Hu, Linhua; Lin, Yuyuan; Poeppelmeier, Kenneth R; Stair, Peter C; Marks, Laurence.
In: Journal of Physics D: Applied Physics, Vol. 50, No. 41, 415301, 15.09.2017.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Controllable ALD synthesis of platinum nanoparticles by tuning different synthesis parameters
AU - Wang, Chuandao
AU - Hu, Linhua
AU - Lin, Yuyuan
AU - Poeppelmeier, Kenneth R
AU - Stair, Peter C
AU - Marks, Laurence
PY - 2017/9/15
Y1 - 2017/9/15
N2 - Pt nanoparticles were successfully deposited using three different atomic layer deposition (ALD) methods, e.g. AB-type, ABC-type and static ABC-type ALD, on two different types of strontium titanate nanocuboids (STO-NCs) samples in a reaction temperature window of 125 °C-300 °C. The influence of reaction temperature, number of ALD cycles, type of substrate, 2nd reagent and type of ALD method on Pt nanoparticle deposition are comprehensively studied and discussed in this work. Varying the reaction temperature and number of cycles across the three different ALD methods affects Pt particle size, density, and loading. Surface termination of STO-NCs substrate will change deposited Pt nanoparticle growth orientation and thermodynamic shape. The B reagent besides platinum precursor can lead to different ligand decomposition mechanism when Pt precursors are exposed: oxygen allows more effective ligand combustion compared to water, however, the Pt particles are more oxidized according to XPS studies. We expect this work provides a way for tailoring nanoparticles with desired size, dispersion, exposed surfaces and chemical state etc, which helps controlling and optimizing their performance when applied as catalysts or nanosensors.
AB - Pt nanoparticles were successfully deposited using three different atomic layer deposition (ALD) methods, e.g. AB-type, ABC-type and static ABC-type ALD, on two different types of strontium titanate nanocuboids (STO-NCs) samples in a reaction temperature window of 125 °C-300 °C. The influence of reaction temperature, number of ALD cycles, type of substrate, 2nd reagent and type of ALD method on Pt nanoparticle deposition are comprehensively studied and discussed in this work. Varying the reaction temperature and number of cycles across the three different ALD methods affects Pt particle size, density, and loading. Surface termination of STO-NCs substrate will change deposited Pt nanoparticle growth orientation and thermodynamic shape. The B reagent besides platinum precursor can lead to different ligand decomposition mechanism when Pt precursors are exposed: oxygen allows more effective ligand combustion compared to water, however, the Pt particles are more oxidized according to XPS studies. We expect this work provides a way for tailoring nanoparticles with desired size, dispersion, exposed surfaces and chemical state etc, which helps controlling and optimizing their performance when applied as catalysts or nanosensors.
KW - atomic layer deposition
KW - nanoparticles, platinum
KW - TEM
KW - XPS
UR - http://www.scopus.com/inward/record.url?scp=85030178482&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85030178482&partnerID=8YFLogxK
U2 - 10.1088/1361-6463/aa8709
DO - 10.1088/1361-6463/aa8709
M3 - Article
AN - SCOPUS:85030178482
VL - 50
JO - Journal Physics D: Applied Physics
JF - Journal Physics D: Applied Physics
SN - 0022-3727
IS - 41
M1 - 415301
ER -