TY - JOUR
T1 - Coordination chemistry routes to films for superconducting electronics
AU - Marks, Tobin J.
N1 - Funding Information:
the Science and Technology Center for Superconductivity (Grant DMR 9120000) and the Northwestern Materials Research Center (Grant DMR 9120521), and by ARPA through contract 91-C-0112.
PY - 1995/1/1
Y1 - 1995/1/1
N2 - This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa2Cu3O7-ϟ), BSCCO (Bi2Sr2Can-lCunO5+(2n-1)+δ) and TBCCO (Tl2Ba2Can-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO3, PrGaO3, BaPbO3, BaTiO3, and Sr2AlTaO6.
AB - This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa2Cu3O7-ϟ), BSCCO (Bi2Sr2Can-lCunO5+(2n-1)+δ) and TBCCO (Tl2Ba2Can-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO3, PrGaO3, BaPbO3, BaTiO3, and Sr2AlTaO6.
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U2 - 10.1351/pac199567020313
DO - 10.1351/pac199567020313
M3 - Article
AN - SCOPUS:0000998129
VL - 67
SP - 313
EP - 318
JO - Pure and Applied Chemistry
JF - Pure and Applied Chemistry
SN - 0033-4545
IS - 2
ER -