Coordination chemistry routes to films for superconducting electronics

Tobin J. Marks

doi:10.1351/pac199567020313

Coordination chemistry routes to films for superconducting electronics

Tobin J. Marks

Northwestern University

Research output: Contribution to journal › Article › peer-review

73 Citations (Scopus)

Abstract

This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa₂Cu₃O₇-ϟ), BSCCO (Bi₂Sr₂Can-lCu_nO₅+(2n-1)+δ) and TBCCO (Tl2Ba2Ca_n-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO₃, PrGaO₃, BaPbO₃, BaTiO₃, and Sr₂AlTaO₆.

Original language	English
Pages (from-to)	313-318
Number of pages	6
Journal	Pure and Applied Chemistry
Volume	67
Issue number	2
DOIs	https://doi.org/10.1351/pac199567020313
Publication status	Published - Jan 1 1995

ASJC Scopus subject areas

Chemistry(all)
Chemical Engineering(all)

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