This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa2Cu3O7-ϟ), BSCCO (Bi2Sr2Can-lCunO5+(2n-1)+δ) and TBCCO (Tl2Ba2Can-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO3, PrGaO3, BaPbO3, BaTiO3, and Sr2AlTaO6.
ASJC Scopus subject areas
- Chemical Engineering(all)