Abstract
This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa2Cu3O7-ϟ), BSCCO (Bi2Sr2Can-lCunO5+(2n-1)+δ) and TBCCO (Tl2Ba2Can-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO3, PrGaO3, BaPbO3, BaTiO3, and Sr2AlTaO6.
| Original language | English |
|---|---|
| Pages (from-to) | 313-318 |
| Number of pages | 6 |
| Journal | Pure and Applied Chemistry |
| Volume | 67 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Jan 1 1995 |
Fingerprint
ASJC Scopus subject areas
- Chemical Engineering(all)
- Chemistry(all)
Cite this
Coordination chemistry routes to films for superconducting electronics. / Marks, Tobin J.
In: Pure and Applied Chemistry, Vol. 67, No. 2, 01.01.1995, p. 313-318.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Coordination chemistry routes to films for superconducting electronics
AU - Marks, Tobin J
PY - 1995/1/1
Y1 - 1995/1/1
N2 - This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa2Cu3O7-ϟ), BSCCO (Bi2Sr2Can-lCunO5+(2n-1)+δ) and TBCCO (Tl2Ba2Can-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO3, PrGaO3, BaPbO3, BaTiO3, and Sr2AlTaO6.
AB - This contribution surveys the design, synthesis, characterization, and implementation of volatile metal-organic coordination complexes for the MOCVD (metal-organic chemical vapor deposition) growth of thin films of high temperature superconductors, lattice-matched dielectrics, and electro-optic materials. The central focus is on fluorinated and fluorine-free β-diketonate and β-ketoiminate complexes. Target materials include the YBCO (YBa2Cu3O7-ϟ), BSCCO (Bi2Sr2Can-lCunO5+(2n-1)+δ) and TBCCO (Tl2Ba2Can-lCun05+(2n-l)+8) superconducting phases as well as YAlO3, NdGaO3, PrGaO3, BaPbO3, BaTiO3, and Sr2AlTaO6.
UR - http://www.scopus.com/inward/record.url?scp=0000998129&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0000998129&partnerID=8YFLogxK
U2 - 10.1351/pac199567020313
DO - 10.1351/pac199567020313
M3 - Article
VL - 67
SP - 313
EP - 318
JO - Pure and Applied Chemistry
JF - Pure and Applied Chemistry
SN - 0033-4545
IS - 2
ER -