Copper(I) tert-butylthiolato clusters as single-source precursors for high-quality chalcocite thin films: Film growth and microstructure control

Sven Schneider, John R. Ireland, Mark C. Hersam, Tobin J. Marks

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26 Citations (Scopus)


Soluble cluster compounds of polymeric (CuStBu) , (1), such as the trialkylphosphine adducts [(CuS t-Bu)4(PR3)2] (R = Me (2a), Et (2b)) or the mixed ligand cluster Cu7(StBu)4(hfa) 3(PMe3)3 (3, hfa = CH-(COCF3) 2), can be used as single-source precursors for chalcocite (α-Cu2S) film growth. Toluene or tetrahydrofuran solutions of 2a, 2b, or 3 afford high-quality chalcocite thin films on glass by aerosol-assisted chemical vapor deposition (AACVD). The films were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, optical spectroscopy, and Hall effect electrical measurements. Surface morphologies were analyzed by scanning electron microscopy and atomic force microscopy. Phase-pure Cu 2S films grown with 2a/b consist of large micrometer-scale plates, which lie flat on the substrate surface, resulting in an extraordinarily strong <001> preferential orientation with respect to the hexagonal high-chalcocite substructure. The film morphologies as grown with precursor 3 suggest competing diketonate versus thiolate coordination at the {100} growth sites offering ligand-assisted film microstructural growth control.

Original languageEnglish
Pages (from-to)2780-2785
Number of pages6
JournalChemistry of Materials
Issue number11
Publication statusPublished - May 29 2007


ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

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