TY - JOUR
T1 - Copper(I) tert-butylthiolato clusters as single-source precursors for high-quality chalcocite thin films
T2 - Film growth and microstructure control
AU - Schneider, Sven
AU - Ireland, John R.
AU - Hersam, Mark C.
AU - Marks, Tobin J.
PY - 2007/5/29
Y1 - 2007/5/29
N2 - Soluble cluster compounds of polymeric (CuStBu) ∞, (1), such as the trialkylphosphine adducts [(CuS t-Bu)4(PR3)2] (R = Me (2a), Et (2b)) or the mixed ligand cluster Cu7(StBu)4(hfa) 3(PMe3)3 (3, hfa = CH-(COCF3) 2), can be used as single-source precursors for chalcocite (α-Cu2S) film growth. Toluene or tetrahydrofuran solutions of 2a, 2b, or 3 afford high-quality chalcocite thin films on glass by aerosol-assisted chemical vapor deposition (AACVD). The films were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, optical spectroscopy, and Hall effect electrical measurements. Surface morphologies were analyzed by scanning electron microscopy and atomic force microscopy. Phase-pure Cu 2S films grown with 2a/b consist of large micrometer-scale plates, which lie flat on the substrate surface, resulting in an extraordinarily strong <001> preferential orientation with respect to the hexagonal high-chalcocite substructure. The film morphologies as grown with precursor 3 suggest competing diketonate versus thiolate coordination at the {100} growth sites offering ligand-assisted film microstructural growth control.
AB - Soluble cluster compounds of polymeric (CuStBu) ∞, (1), such as the trialkylphosphine adducts [(CuS t-Bu)4(PR3)2] (R = Me (2a), Et (2b)) or the mixed ligand cluster Cu7(StBu)4(hfa) 3(PMe3)3 (3, hfa = CH-(COCF3) 2), can be used as single-source precursors for chalcocite (α-Cu2S) film growth. Toluene or tetrahydrofuran solutions of 2a, 2b, or 3 afford high-quality chalcocite thin films on glass by aerosol-assisted chemical vapor deposition (AACVD). The films were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, optical spectroscopy, and Hall effect electrical measurements. Surface morphologies were analyzed by scanning electron microscopy and atomic force microscopy. Phase-pure Cu 2S films grown with 2a/b consist of large micrometer-scale plates, which lie flat on the substrate surface, resulting in an extraordinarily strong <001> preferential orientation with respect to the hexagonal high-chalcocite substructure. The film morphologies as grown with precursor 3 suggest competing diketonate versus thiolate coordination at the {100} growth sites offering ligand-assisted film microstructural growth control.
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U2 - 10.1021/cm0700495
DO - 10.1021/cm0700495
M3 - Article
AN - SCOPUS:34250214202
VL - 19
SP - 2780
EP - 2785
JO - Chemistry of Materials
JF - Chemistry of Materials
SN - 0897-4756
IS - 11
ER -