Deposition of nonlinear optical films of potassium titanyl phosphate (KTiOPO4) by pulsed excimer laser ablation) by Pulsed Excimer Laser Ablation

Fulin Xiong, M. Hagerman, H. Zhou, V. Kozhevnikov, G. K. Wong, Kenneth R Poeppelmeier, J. B. Ketterson, Robert P. H. Chang

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Nonlinear optical films of potassium titanyl phosphate (KTiOP04, or KTP) have been, for the first time, fabricated by pulsed excimer laser deposition on several substrates such as sapphire, Si(100) crystals, and fused quartz slides. The properties of the deposited KTP films, such as the chemical stoichiometry, crystallinity, effective index of refraction, and Raman response, have been extensively characterized. All of the results match the values of KTP crystals. The nonlinear optical property of the second harmonic generation of the films has been evaluated, showing a highefficiency comparable to a bulk value of KTP crystals. It is suggested that the success of this deposition relies on thetransient congruent process generated by a pulsed UV laser beam.

Original languageEnglish
Pages (from-to)1446-1450
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
Publication statusPublished - 1994


ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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