Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter

M. Chhowalla, M. Weiler, C. A. Davis, B. Kleinsorge, G. A.J. Amaratunga

Research output: Contribution to journalArticle

23 Citations (Scopus)
Original languageEnglish
Number of pages1
JournalApplied Physics Letters
Volume67
DOIs
Publication statusPublished - Dec 1 1995

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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