Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter

Manish Chhowalla, M. Weiler, C. A. Davis, B. Kleinsorge, G. A J Amaratunga

Research output: Contribution to journal › Article

23 Citations (Scopus)
Original languageEnglish
Pages (from-to)894
Number of pages1
JournalApplied Physics Letters
Volume67
DOIs
Publication statusPublished - 1995

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter. / Chhowalla, Manish; Weiler, M.; Davis, C. A.; Kleinsorge, B.; Amaratunga, G. A J.

In: Applied Physics Letters, Vol. 67, 1995, p. 894.

Research output: Contribution to journal › Article

Chhowalla, M, Weiler, M, Davis, CA, Kleinsorge, B & Amaratunga, GAJ 1995, 'Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter', Applied Physics Letters, vol. 67, pp. 894. https://doi.org/10.1063/1.114728
Chhowalla M, Weiler M, Davis CA, Kleinsorge B, Amaratunga GAJ. Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter. Applied Physics Letters. 1995;67:894. https://doi.org/10.1063/1.114728
Chhowalla, Manish ; Weiler, M. ; Davis, C. A. ; Kleinsorge, B. ; Amaratunga, G. A J. / Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter. In: Applied Physics Letters. 1995 ; Vol. 67. pp. 894.
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