Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter

M. Chhowalla, M. Weiler, C. A. Davis, B. Kleinsorge, G. A.J. Amaratunga

Research output: Contribution to journal › Article

23 Citations (Scopus)

@article{e3bc6ed2697243f7baa99f07ac6d6055,

title = "Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter",

author = "M. Chhowalla and M. Weiler and Davis, {C. A.} and B. Kleinsorge and Amaratunga, {G. A.J.}",

year = "1995",

month = dec

day = "1",

doi = "10.1063/1.114728",

language = "English",

volume = "67",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

}

TY - JOUR

T1 - Deposition of smooth tetrahedral amorphous carbon thin films using a cathodic arc without a macroparticle filter

AU - Chhowalla, M.

AU - Weiler, M.

AU - Davis, C. A.

AU - Kleinsorge, B.

AU - Amaratunga, G. A.J.

PY - 1995/12/1

Y1 - 1995/12/1

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U2 - 10.1063/1.114728

DO - 10.1063/1.114728

M3 - Article

AN - SCOPUS:0001695324

VL - 67

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

ER -