Proton-induced x-ray emission combined with channeling techniques has been used to evaluate Zn-diffused InP crystals. The measurements showed that the total Zn concentration was (1.00.3)×1019/cm3 with 505% of the dopant residing on lattice sites for samples prepared by sealed-ampoule diffusion at 700°C with a P overpressure. Hall measurements yielded a hole concentration of (5.00.5)×1018/cm3, indicating that most of the substitutional Zn in InP is electrically active and not associated in neutral substitutional complexes as previously suggested. Fine precipitates observed by transmission electron microscopy are assumed to contain the nonsubstitutional Zn.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)