Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry

P. L. Washington, H. C. Ong, J. Y. Dai, Robert P. H. Chang

Research output: Contribution to journalArticle

162 Citations (Scopus)

Abstract

Spectroscopic ellipsometry (SE) has been used to determine the complex pseudo dielectric functions, ε1(E)+iε2(E), of ZnO films on (0001) Al2O3 substrates over the spectral range of 1.33 and 4.96 eV at room temperature. The SE measurements are carried out with E⊥c at angles of incidence of 60° and 65° with respect to the surface normal. Below the band gap, the refractive index n is found to follow the first order Sellmeir dispersion relationship n2(λ)=1+1.881λ2/(λ 2-0.05382). A free excitonic structure located at the band edge of 3.32 eV is clearly observed in the pseudo absorption spectrum. Elliott expression with Lorentzian broadening is used to model the pseudo absorption coefficient above the band edge.

Original languageEnglish
Pages (from-to)3261-3263
Number of pages3
JournalApplied Physics Letters
Volume72
Issue number25
DOIs
Publication statusPublished - 1998

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zinc oxides
ellipsometry
thin films
absorptivity
incidence
refractivity
absorption spectra
room temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry. / Washington, P. L.; Ong, H. C.; Dai, J. Y.; Chang, Robert P. H.

In: Applied Physics Letters, Vol. 72, No. 25, 1998, p. 3261-3263.

Research output: Contribution to journalArticle

Washington, P. L. ; Ong, H. C. ; Dai, J. Y. ; Chang, Robert P. H. / Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry. In: Applied Physics Letters. 1998 ; Vol. 72, No. 25. pp. 3261-3263.
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