A series of ~60 nm thick indium oxide thin-films, all amorphous as determined by x-ray diffraction, were found to have physical and electrical properties that depended on the temperature of deposition. The carrier mobility and film conductivity decreased with decreasing deposition temperature; the best electrical properties of high mobility and conductivity were observed at a deposition temperature just below the temperature at which crystalline films formed. The density of the film also decreased with deposition temperature from 7.2 g/cm3 at +50 °C to 5.3 g/cm3 at −100 °C.
|Number of pages||6|
|Journal||Progress in Natural Science: Materials International|
|Publication status||Published - Oct 1 2013|
- Deposition temperature
- Transparent conducting oxide
ASJC Scopus subject areas
- Materials Science(all)