Diffusion and interface growth in hafnium oxide and silicate ultrathin films on Si(001)

L. V. Goncharova, M. Dalponte, T. Feng, T. Gustafsson, E. Garfunkel, P. S. Lysaght, G. Bersuker

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

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