Abstract
The authors have reported the structure of the nanoclusters in carbon nitride thin films before [D. Roy, Phys. Rev. B 70, 035406 (2004)]. In this work, effects of the addition of hydrogen in the deposition gas mixture on the structures of carbon nitride thin films prepared by magnetron sputtering were investigated using Raman spectroscopy. Raman measurements showed that the structures of carbon nanoclusters remained unaffected by the addition of hydrogen in the carbon nitride films. On the other hand, the structures of amorphous thin films were affected by the addition of hydrogen in the deposition gas mixture. These are explained in terms of changes in the ratios of the D -peak to the G -peak intensities and shifts in the G -peak centers.
| Original language | English |
|---|---|
| Pages (from-to) | 1227-1230 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 27 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - Sep 21 2009 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
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Cite this
Roy, D., Chhowalla, M., Hellgren, N., & Amaratunga, G. A. J. (2009). Does hydrogen change the fullerenelike structure in C Nx thin films? Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 27(5), 1227-1230. https://doi.org/10.1116/1.3207949