Early stages of plasma synthesis of diamond films

R. Meilunas, M. S. Wong, K. C. Sheng, Robert P. H. Chang, R. P. Van Duyne

Research output: Contribution to journalArticle

74 Citations (Scopus)

Abstract

The early stages of diamond film nucleation and growth in a microwave plasma have been studied in detail as a function of important deposition parameters. The influence of the substrate temperature on the diamond nucleation rate, quality, and final film morphology has been elucidated through Raman spectroscopy and scanning electron microscopy measurements. Using transmission infrared spectroscopy and x-ray diffraction, it is found that a carbide layer is initially formed on the substrate prior to the growth of the diamond film. Furthermore, the final film morphology is also a strong function of the plasma starting condition, the gas composition, and the substrate temperature.

Original languageEnglish
Pages (from-to)2204-2206
Number of pages3
JournalApplied Physics Letters
Volume54
Issue number22
DOIs
Publication statusPublished - 1989

Fingerprint

diamond films
synthesis
nucleation
gas composition
carbides
x ray diffraction
Raman spectroscopy
diamonds
infrared spectroscopy
microwaves
scanning electron microscopy
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Meilunas, R., Wong, M. S., Sheng, K. C., Chang, R. P. H., & Van Duyne, R. P. (1989). Early stages of plasma synthesis of diamond films. Applied Physics Letters, 54(22), 2204-2206. https://doi.org/10.1063/1.101124

Early stages of plasma synthesis of diamond films. / Meilunas, R.; Wong, M. S.; Sheng, K. C.; Chang, Robert P. H.; Van Duyne, R. P.

In: Applied Physics Letters, Vol. 54, No. 22, 1989, p. 2204-2206.

Research output: Contribution to journalArticle

Meilunas, R, Wong, MS, Sheng, KC, Chang, RPH & Van Duyne, RP 1989, 'Early stages of plasma synthesis of diamond films', Applied Physics Letters, vol. 54, no. 22, pp. 2204-2206. https://doi.org/10.1063/1.101124
Meilunas, R. ; Wong, M. S. ; Sheng, K. C. ; Chang, Robert P. H. ; Van Duyne, R. P. / Early stages of plasma synthesis of diamond films. In: Applied Physics Letters. 1989 ; Vol. 54, No. 22. pp. 2204-2206.
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