Effect of nitrogen on competitive growth mechanisms of diamond thin films

V. M. Ayres, T. R. Bieler, Mercouri G Kanatzidis, J. Spano, S. Hagopian, H. Balhareth, B. F. Wright, M. Farhan, J. Abdul Majeed, D. Spach, B. L. Wright, J. Asmussen

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Abstract

The correlation between surface morphology and texture (distribution of crystal orientations) has been analyzed to determine how nitrogen provides a competitive growth advantage for the formation of 〈001〉 texture in diamond films. The film morphologies were measured using TappingModeTM atomic force microscopy. Corresponding texture studies were performed using X-ray diffraction with a four-circle goniometer to measure (111), (220) and (400) pole figures. Orientation distributions were generated from the pole figures, from which inverse pole figures were made to quantify how texture was affected by process variables. After 2 h of growth, with and without nitrogen, similar textures were observed. With increasing time, nitrogen stimulates the growth of orientations between 〈001〉, 〈114〉, and 〈104〉. Without nitrogen, the majority orientation is 〈101〉 with a secondary component near 〈113〉. Examination of fracture surfaces indicates correlations with the observed texture and morphology changes.

Original languageEnglish
Pages (from-to)236-240
Number of pages5
JournalDiamond and Related Materials
Volume9
Issue number3
DOIs
Publication statusPublished - Apr 2000

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Ayres, V. M., Bieler, T. R., Kanatzidis, M. G., Spano, J., Hagopian, S., Balhareth, H., ... Asmussen, J. (2000). Effect of nitrogen on competitive growth mechanisms of diamond thin films. Diamond and Related Materials, 9(3), 236-240. https://doi.org/10.1016/S0925-9635(99)00311-8