Effect of nitrogen passivation on interface composition and physical stress in SiO2/SiC(4H) structures

Xiuyan Li, Sang Soo Lee, Mengjun Li, Alexei Ermakov, Jonnathan Medina-Ramos, Timothy T. Fister, Voshadhi Amarasinghe, Torgny Gustafsson, Eric Garfunkel, Paul Fenter, Leonard C. Feldman

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Physics & Astronomy