EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON.

Robert P. H. Chang, J. Siejka, J. Perriere, M. Croset

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings - The Electrochemical Society
PublisherElectrochem Soc Inc
Pages38-44
Number of pages7
Volume82-6
Publication statusPublished - 1982

Fingerprint

Plasmas
Silicon
Oxidation
Ions

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Chang, R. P. H., Siejka, J., Perriere, J., & Croset, M. (1982). EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON. In Proceedings - The Electrochemical Society (Vol. 82-6, pp. 38-44). Electrochem Soc Inc.

EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON. / Chang, Robert P. H.; Siejka, J.; Perriere, J.; Croset, M.

Proceedings - The Electrochemical Society. Vol. 82-6 Electrochem Soc Inc, 1982. p. 38-44.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chang, RPH, Siejka, J, Perriere, J & Croset, M 1982, EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON. in Proceedings - The Electrochemical Society. vol. 82-6, Electrochem Soc Inc, pp. 38-44.
Chang RPH, Siejka J, Perriere J, Croset M. EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON. In Proceedings - The Electrochemical Society. Vol. 82-6. Electrochem Soc Inc. 1982. p. 38-44
Chang, Robert P. H. ; Siejka, J. ; Perriere, J. ; Croset, M. / EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON. Proceedings - The Electrochemical Society. Vol. 82-6 Electrochem Soc Inc, 1982. pp. 38-44
@inproceedings{326ed46799f54b038c94ef0413f24aac,
title = "EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON.",
author = "Chang, {Robert P. H.} and J. Siejka and J. Perriere and M. Croset",
year = "1982",
language = "English",
volume = "82-6",
pages = "38--44",
booktitle = "Proceedings - The Electrochemical Society",
publisher = "Electrochem Soc Inc",

}

TY - GEN

T1 - EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON.

AU - Chang, Robert P. H.

AU - Siejka, J.

AU - Perriere, J.

AU - Croset, M.

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=0020295808&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020295808&partnerID=8YFLogxK

M3 - Conference contribution

VL - 82-6

SP - 38

EP - 44

BT - Proceedings - The Electrochemical Society

PB - Electrochem Soc Inc

ER -