EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON.

Robert P. H. Chang, J. Siejka, J. Perriere, M. Croset

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings - The Electrochemical Society
PublisherElectrochem Soc Inc
Pages38-44
Number of pages7
Volume82-6
Publication statusPublished - 1982

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Chang, R. P. H., Siejka, J., Perriere, J., & Croset, M. (1982). EFFECTS OF ION TRANSPORT ON PLASMA OXIDATION OF SILICON. In Proceedings - The Electrochemical Society (Vol. 82-6, pp. 38-44). Electrochem Soc Inc.