Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors

E. A. Kneer, Dunbar P Birnie, G. Teowee, J. C. Podlesny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Sol-gel derived lead zirconate titanate (PZT) films were deposited and crystallized on platinized Si/SiO2 and Al2O3 wafer substrates in the film thickness range of 500 - 7000 angstrom. Electrical testing was conducted to evaluate the effect of PZT film thickness on capacitor performance. Optical microscopy and AFM data were used to identify factors which might cause shorting in crystallized PZT films. Thin films of Ti or TiOx were used for Pt bottom and top electrode adhesion in the substrate/Pt/PZT/Pt structured device. The effect of these adhesion layers has been investigated for several electrode composites. The fatigue behavior of these devices has been analyzed and compared.

Original languageEnglish
Title of host publicationIEEE International Symposium on Applications of Ferroelectrics
Editors Anon
PublisherIEEE
Pages446-449
Number of pages4
Publication statusPublished - 1994
EventProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics - University Park, PA, USA
Duration: Aug 7 1994Aug 10 1994

Other

OtherProceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics
CityUniversity Park, PA, USA
Period8/7/948/10/94

Fingerprint

Sol-gels
Film thickness
Capacitors
Adhesion
Electrodes
Substrates
Optical microscopy
Fatigue of materials
Thin films
Composite materials
Testing
lead titanate zirconate

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

Cite this

Kneer, E. A., Birnie, D. P., Teowee, G., & Podlesny, J. C. (1994). Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors. In Anon (Ed.), IEEE International Symposium on Applications of Ferroelectrics (pp. 446-449). IEEE.

Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors. / Kneer, E. A.; Birnie, Dunbar P; Teowee, G.; Podlesny, J. C.

IEEE International Symposium on Applications of Ferroelectrics. ed. / Anon. IEEE, 1994. p. 446-449.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kneer, EA, Birnie, DP, Teowee, G & Podlesny, JC 1994, Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors. in Anon (ed.), IEEE International Symposium on Applications of Ferroelectrics. IEEE, pp. 446-449, Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics, University Park, PA, USA, 8/7/94.
Kneer EA, Birnie DP, Teowee G, Podlesny JC. Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors. In Anon, editor, IEEE International Symposium on Applications of Ferroelectrics. IEEE. 1994. p. 446-449
Kneer, E. A. ; Birnie, Dunbar P ; Teowee, G. ; Podlesny, J. C. / Effects of sol-gel PZT film thickness and electrode structure on the electrical behavior of Pt/PZT/Pt capacitors. IEEE International Symposium on Applications of Ferroelectrics. editor / Anon. IEEE, 1994. pp. 446-449
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