Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates

C. Lai; J. B. Wachtman; G. H. Sigel; F. C. Cosandey; G. Rudd; J. L. Oliver; Steve Garofalini

Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates

C. Lai, J. B. Wachtman, G. H. Sigel, F. C. Cosandey, G. Rudd, J. L. Oliver, Steve Garofalini

Rutgers University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings
Editors	Harry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
Publisher	Publ by Materials Research Society
Pages	689-694
Number of pages	6
Volume	280
ISBN (Print)	1558991751
Publication status	Published - 1993
Event	Proceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA Duration: Nov 30 1992 → Dec 4 1992

Other

Other	Proceedings of the 1992 Fall Meeting of the Materials Research Society
City	Boston, MA, USA
Period	11/30/92 → 12/4/92

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials

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Lai, C., Wachtman, J. B., Sigel, G. H., Cosandey, F. C., Rudd, G., Oliver, J. L., & Garofalini, S. (1993). Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. In H. A. Atwater, E. Chason, M. H. Grabow, & M. G. Lagally (Eds.), Materials Research Society Symposium Proceedings (Vol. 280, pp. 689-694). Publ by Materials Research Society.

Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. / Lai, C.; Wachtman, J. B.; Sigel, G. H.; Cosandey, F. C.; Rudd, G.; Oliver, J. L.; Garofalini, Steve.

Materials Research Society Symposium Proceedings. ed. / Harry A. Atwater; Eric Chason; Marcia H. Grabow; Max G. Lagally. Vol. 280 Publ by Materials Research Society, 1993. p. 689-694.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lai, C, Wachtman, JB, Sigel, GH, Cosandey, FC, Rudd, G, Oliver, JL & Garofalini, S 1993, Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. in HA Atwater, E Chason, MH Grabow & MG Lagally (eds), Materials Research Society Symposium Proceedings. vol. 280, Publ by Materials Research Society, pp. 689-694, Proceedings of the 1992 Fall Meeting of the Materials Research Society, Boston, MA, USA, 11/30/92.

Lai, C. ; Wachtman, J. B. ; Sigel, G. H. ; Cosandey, F. C. ; Rudd, G. ; Oliver, J. L. ; Garofalini, Steve. / Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. Materials Research Society Symposium Proceedings. editor / Harry A. Atwater ; Eric Chason ; Marcia H. Grabow ; Max G. Lagally. Vol. 280 Publ by Materials Research Society, 1993. pp. 689-694

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abstract = "Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).",

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