Abstract
Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium Proceedings |
| Editors | Harry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally |
| Publisher | Publ by Materials Research Society |
| Pages | 689-694 |
| Number of pages | 6 |
| Volume | 280 |
| ISBN (Print) | 1558991751 |
| Publication status | Published - 1993 |
| Event | Proceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA Duration: Nov 30 1992 → Dec 4 1992 |
Other
| Other | Proceedings of the 1992 Fall Meeting of the Materials Research Society |
|---|---|
| City | Boston, MA, USA |
| Period | 11/30/92 → 12/4/92 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
Cite this
Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. / Lai, C.; Wachtman, J. B.; Sigel, G. H.; Cosandey, F. C.; Rudd, G.; Oliver, J. L.; Garofalini, Steve.
Materials Research Society Symposium Proceedings. ed. / Harry A. Atwater; Eric Chason; Marcia H. Grabow; Max G. Lagally. Vol. 280 Publ by Materials Research Society, 1993. p. 689-694.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates
AU - Lai, C.
AU - Wachtman, J. B.
AU - Sigel, G. H.
AU - Cosandey, F. C.
AU - Rudd, G.
AU - Oliver, J. L.
AU - Garofalini, Steve
PY - 1993
Y1 - 1993
N2 - Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).
AB - Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).
UR - http://www.scopus.com/inward/record.url?scp=0027873923&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027873923&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0027873923
SN - 1558991751
VL - 280
SP - 689
EP - 694
BT - Materials Research Society Symposium Proceedings
A2 - Atwater, Harry A.
A2 - Chason, Eric
A2 - Grabow, Marcia H.
A2 - Lagally, Max G.
PB - Publ by Materials Research Society
ER -