Abstract
Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium Proceedings |
| Editors | Harry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally |
| Publisher | Publ by Materials Research Society |
| Pages | 689-694 |
| Number of pages | 6 |
| Volume | 280 |
| ISBN (Print) | 1558991751 |
| Publication status | Published - 1993 |
| Event | Proceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA Duration: Nov 30 1992 → Dec 4 1992 |
Other
| Other | Proceedings of the 1992 Fall Meeting of the Materials Research Society |
|---|---|
| City | Boston, MA, USA |
| Period | 11/30/92 → 12/4/92 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
Cite this
Lai, C., Wachtman, J. B., Sigel, G. H., Cosandey, F. C., Rudd, G., Oliver, J. L., & Garofalini, S. (1993). Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. In H. A. Atwater, E. Chason, M. H. Grabow, & M. G. Lagally (Eds.), Materials Research Society Symposium Proceedings (Vol. 280, pp. 689-694). Publ by Materials Research Society.