Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates

C. Lai, J. B. Wachtman, G. H. Sigel, F. C. Cosandey, G. Rudd, J. L. Oliver, Steve Garofalini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsHarry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
PublisherPubl by Materials Research Society
Pages689-694
Number of pages6
Volume280
ISBN (Print)1558991751
Publication statusPublished - 1993
EventProceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 30 1992Dec 4 1992

Other

OtherProceedings of the 1992 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/30/9212/4/92

Fingerprint

Diamond films
Polishing
Thin films
Sonication
Silicon
Substrates
High resolution transmission electron microscopy
Etching
Microstructure
Scanning electron microscopy
Acids

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Lai, C., Wachtman, J. B., Sigel, G. H., Cosandey, F. C., Rudd, G., Oliver, J. L., & Garofalini, S. (1993). Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. In H. A. Atwater, E. Chason, M. H. Grabow, & M. G. Lagally (Eds.), Materials Research Society Symposium Proceedings (Vol. 280, pp. 689-694). Publ by Materials Research Society.

Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. / Lai, C.; Wachtman, J. B.; Sigel, G. H.; Cosandey, F. C.; Rudd, G.; Oliver, J. L.; Garofalini, Steve.

Materials Research Society Symposium Proceedings. ed. / Harry A. Atwater; Eric Chason; Marcia H. Grabow; Max G. Lagally. Vol. 280 Publ by Materials Research Society, 1993. p. 689-694.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lai, C, Wachtman, JB, Sigel, GH, Cosandey, FC, Rudd, G, Oliver, JL & Garofalini, S 1993, Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. in HA Atwater, E Chason, MH Grabow & MG Lagally (eds), Materials Research Society Symposium Proceedings. vol. 280, Publ by Materials Research Society, pp. 689-694, Proceedings of the 1992 Fall Meeting of the Materials Research Society, Boston, MA, USA, 11/30/92.
Lai C, Wachtman JB, Sigel GH, Cosandey FC, Rudd G, Oliver JL et al. Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. In Atwater HA, Chason E, Grabow MH, Lagally MG, editors, Materials Research Society Symposium Proceedings. Vol. 280. Publ by Materials Research Society. 1993. p. 689-694
Lai, C. ; Wachtman, J. B. ; Sigel, G. H. ; Cosandey, F. C. ; Rudd, G. ; Oliver, J. L. ; Garofalini, Steve. / Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates. Materials Research Society Symposium Proceedings. editor / Harry A. Atwater ; Eric Chason ; Marcia H. Grabow ; Max G. Lagally. Vol. 280 Publ by Materials Research Society, 1993. pp. 689-694
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