Effects of substrate pretreatments on growth of polycrystalline diamond thin films on SI(100) substrates

C. Lai, J. B. Wachtman, G. H. Sigel, F. C. Cosandey, G. Rudd, J. L. Oliver, Steve Garofalini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microstructures of polycrystalline diamond thin films deposited on silicon (100) substrates which were pretreated by (a) wet polishing, (b) polishing, (c) sonication and (d) acid etching, respectively, have been studied by scanning electron microscopy (SEM) and high resolution transmission electron microscopy (HREM).

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsHarry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
PublisherPubl by Materials Research Society
Pages689-694
Number of pages6
Volume280
ISBN (Print)1558991751
Publication statusPublished - 1993
EventProceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 30 1992Dec 4 1992

Other

OtherProceedings of the 1992 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/30/9212/4/92

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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