Abstract
In pulsed-laser deposition (PLD), there are many processing parameters that influence film properties such as substrate-target distance, background reactive gas pressure, laser energy, substrate temperature and composition in multi-component systems. By introducing a 12.7-mm diameter circular aperture in front of a 76.2-mm silicon wafer and rotating the substrate while changing conditions during the PLD process, these parameters may be studied in a combinatorial fashion, discretely as a function of processing conditions. We demonstrate the use of the aperture technique to systematically study the effects of oxygen partial pressure on the film stoichiometry and growth rate of VO x , using Rutherford backscattering spectrometry (RBS). In another example, we discuss the effect of growth temperature on TiO 2 films characterized by X-ray diffraction and Fourier transform far-infrared (Terahertz) absorption spectroscopy. We demonstrate that we have considerable combinatorial control of other processing variables besides composition in our combi-PLD system. These may be used to systematically study film growth and properties.
Original language | English |
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Pages (from-to) | 785-788 |
Number of pages | 4 |
Journal | Applied Surface Science |
Volume | 254 |
Issue number | 3 |
DOIs | |
Publication status | Published - Nov 30 2007 |
Keywords
- Combinatorial
- Thin films
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films