Effects of two-stage deposition on the structure and properties of heteroepitaxial BaTiO3 thin films

D. J. Towner, J. Ni, Tobin J Marks, B. W. Wessels

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

Layer-by-layer heteroepitaxial growth of BaTiO3 thin films on single-crystal MgO (1 0 0) is demonstrated using a two-stage metal-organic chemical vapor deposition technique. Films grown using this technique are particularly well suited for photonic applications, with near atomically smooth surfaces and exceptional crystalline quality. Films with surface roughness as low as 0.23 nm RMS and X-ray rocking curve full-width-at-half-maximum values as low as 0.28° have been obtained. Refractive indices approaching those of bulk BaTiO3 are demonstrated, with deviations from bulk explained by strain-modified tetragonality and a polydomain structure.

Original languageEnglish
Pages (from-to)107-113
Number of pages7
JournalJournal of Crystal Growth
Volume255
Issue number1-2
DOIs
Publication statusPublished - Jul 2003

Fingerprint

Organic Chemicals
Thin films
Organic chemicals
thin films
Full width at half maximum
Epitaxial growth
Photonics
metalorganic chemical vapor deposition
Chemical vapor deposition
Refractive index
surface roughness
Surface roughness
Metals
Single crystals
photonics
refractivity
Crystalline materials
deviation
X rays
single crystals

Keywords

  • A1. Characterization
  • A1. Surface structure
  • A3. Metalorganic chemical vapor deposition
  • B1. Perovskites
  • B2. Ferroelectric materials

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Effects of two-stage deposition on the structure and properties of heteroepitaxial BaTiO3 thin films. / Towner, D. J.; Ni, J.; Marks, Tobin J; Wessels, B. W.

In: Journal of Crystal Growth, Vol. 255, No. 1-2, 07.2003, p. 107-113.

Research output: Contribution to journalArticle

@article{37fc996f17fb4fd4b695e10e35ae9ea1,
title = "Effects of two-stage deposition on the structure and properties of heteroepitaxial BaTiO3 thin films",
abstract = "Layer-by-layer heteroepitaxial growth of BaTiO3 thin films on single-crystal MgO (1 0 0) is demonstrated using a two-stage metal-organic chemical vapor deposition technique. Films grown using this technique are particularly well suited for photonic applications, with near atomically smooth surfaces and exceptional crystalline quality. Films with surface roughness as low as 0.23 nm RMS and X-ray rocking curve full-width-at-half-maximum values as low as 0.28° have been obtained. Refractive indices approaching those of bulk BaTiO3 are demonstrated, with deviations from bulk explained by strain-modified tetragonality and a polydomain structure.",
keywords = "A1. Characterization, A1. Surface structure, A3. Metalorganic chemical vapor deposition, B1. Perovskites, B2. Ferroelectric materials",
author = "Towner, {D. J.} and J. Ni and Marks, {Tobin J} and Wessels, {B. W.}",
year = "2003",
month = "7",
doi = "10.1016/S0022-0248(03)01195-3",
language = "English",
volume = "255",
pages = "107--113",
journal = "Journal of Crystal Growth",
issn = "0022-0248",
publisher = "Elsevier",
number = "1-2",

}

TY - JOUR

T1 - Effects of two-stage deposition on the structure and properties of heteroepitaxial BaTiO3 thin films

AU - Towner, D. J.

AU - Ni, J.

AU - Marks, Tobin J

AU - Wessels, B. W.

PY - 2003/7

Y1 - 2003/7

N2 - Layer-by-layer heteroepitaxial growth of BaTiO3 thin films on single-crystal MgO (1 0 0) is demonstrated using a two-stage metal-organic chemical vapor deposition technique. Films grown using this technique are particularly well suited for photonic applications, with near atomically smooth surfaces and exceptional crystalline quality. Films with surface roughness as low as 0.23 nm RMS and X-ray rocking curve full-width-at-half-maximum values as low as 0.28° have been obtained. Refractive indices approaching those of bulk BaTiO3 are demonstrated, with deviations from bulk explained by strain-modified tetragonality and a polydomain structure.

AB - Layer-by-layer heteroepitaxial growth of BaTiO3 thin films on single-crystal MgO (1 0 0) is demonstrated using a two-stage metal-organic chemical vapor deposition technique. Films grown using this technique are particularly well suited for photonic applications, with near atomically smooth surfaces and exceptional crystalline quality. Films with surface roughness as low as 0.23 nm RMS and X-ray rocking curve full-width-at-half-maximum values as low as 0.28° have been obtained. Refractive indices approaching those of bulk BaTiO3 are demonstrated, with deviations from bulk explained by strain-modified tetragonality and a polydomain structure.

KW - A1. Characterization

KW - A1. Surface structure

KW - A3. Metalorganic chemical vapor deposition

KW - B1. Perovskites

KW - B2. Ferroelectric materials

UR - http://www.scopus.com/inward/record.url?scp=0038040575&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038040575&partnerID=8YFLogxK

U2 - 10.1016/S0022-0248(03)01195-3

DO - 10.1016/S0022-0248(03)01195-3

M3 - Article

VL - 255

SP - 107

EP - 113

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

SN - 0022-0248

IS - 1-2

ER -