Elastic deformations during phase transition in freestanding BaTiO3 thin films

Jaya P. Nair, Natalie Stavitski, Ilya Zon, Konstantin Gartsman, Igor Lubomirsky

Research output: Contribution to journalConference articlepeer-review

Abstract

Elastic deformations during phase transition in freestanding BaTiO3 thin films were investigated. BaTiO3 films were prepared by sol-gel technique or RF magnetron sputtering on silicon substrates, covered by randomly oriented 120 nm thick Al2O3. The as-deposited films were under tensile stress of 100-170 MPa and did not show neither pyroelectric nor piezoelectric properties. Partial substrate removal caused the freestanding films to expand laterally by 0.3-0.5% and corrugate. Dielectric constant of the freestanding films (620±10) was found to be significantly higher than that of the substrate supported films (110±20). The freestanding films showed detectable piezoelectric effect, which indicated that the lateral expansion was originated from the substrate-suppressed cubic-tetragonal phase transition.

Original languageEnglish
Pages (from-to)245-250
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume718
DOIs
Publication statusPublished - 2002
EventPerovskite Materials - San Francisco, CA, United States
Duration: Apr 1 2002Apr 5 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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