Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes

M. Engel, D. B. Farmer, J. Tirapu Azpiroz, J. W.T. Seo, J. Kang, P. Avouris, Mark C Hersam, R. Krupke, M. Steiner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Here we detail a complete process flow to overcome the challenge of placement of carbon nanotubes on solid surfaces, limiting "bottom-up", large-scale integration in semiconductor process technology. To date most bottom up placement strategies are based on surface functionalization having the drawback that chemical modifications can deteriorate the deposited carbon nanotubes. The application of dielectrophoretic techniques eliminates the chemical treatment, however, it necessitates the usage of conductive electrodes typically made out of metal. These metallic electrodes limit performance, scaling, and density of integrated electronic devices. Here, we report a method for electric-field assisted placement of purely semiconducting carbon nanotubes from solution at predefined locations by means of large-scale graphene layers having patterned nanoscale deposition sites. The patterned graphene layers can be removed residue-free after carbon nanotube deposition. In order to demonstrate the application potential, we have assembled at predefined substrate locations carbon nanotubes of varying density and integrated them into field-effect transistor. The graphene-based placement process, implemented with nanoscale resolution at wafer scale, could enable mass manufacturing of application-specific electronics based on carbon nanotubes.

Original languageEnglish
Title of host publicationTechConnect Briefs 2018 - Advanced Materials
EditorsMatthew Laudon, Fiona Case, Fiona Case, Bart Romanowicz
PublisherTechConnect
Pages54-57
Number of pages4
Volume1
ISBN (Electronic)9780998878225
Publication statusPublished - Jan 1 2018
Event11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference - Anaheim, United States
Duration: May 13 2018May 16 2018

Other

Other11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference
CountryUnited States
CityAnaheim
Period5/13/185/16/18

Fingerprint

Carbon Nanotubes
Graphite
Graphene
Carbon nanotubes
Electric fields
Electrodes
LSI circuits
Chemical modification
Field effect transistors
Electronic equipment
Metals
Semiconductor materials
Substrates

Keywords

  • Carbon nanotubes
  • Dielectrophoresis
  • Graphene
  • Nanoelectronics
  • Placement

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Engel, M., Farmer, D. B., Azpiroz, J. T., Seo, J. W. T., Kang, J., Avouris, P., ... Steiner, M. (2018). Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes. In M. Laudon, F. Case, F. Case, & B. Romanowicz (Eds.), TechConnect Briefs 2018 - Advanced Materials (Vol. 1, pp. 54-57). TechConnect.

Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes. / Engel, M.; Farmer, D. B.; Azpiroz, J. Tirapu; Seo, J. W.T.; Kang, J.; Avouris, P.; Hersam, Mark C; Krupke, R.; Steiner, M.

TechConnect Briefs 2018 - Advanced Materials. ed. / Matthew Laudon; Fiona Case; Fiona Case; Bart Romanowicz. Vol. 1 TechConnect, 2018. p. 54-57.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Engel, M, Farmer, DB, Azpiroz, JT, Seo, JWT, Kang, J, Avouris, P, Hersam, MC, Krupke, R & Steiner, M 2018, Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes. in M Laudon, F Case, F Case & B Romanowicz (eds), TechConnect Briefs 2018 - Advanced Materials. vol. 1, TechConnect, pp. 54-57, 11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference, Anaheim, United States, 5/13/18.
Engel M, Farmer DB, Azpiroz JT, Seo JWT, Kang J, Avouris P et al. Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes. In Laudon M, Case F, Case F, Romanowicz B, editors, TechConnect Briefs 2018 - Advanced Materials. Vol. 1. TechConnect. 2018. p. 54-57
Engel, M. ; Farmer, D. B. ; Azpiroz, J. Tirapu ; Seo, J. W.T. ; Kang, J. ; Avouris, P. ; Hersam, Mark C ; Krupke, R. ; Steiner, M. / Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes. TechConnect Briefs 2018 - Advanced Materials. editor / Matthew Laudon ; Fiona Case ; Fiona Case ; Bart Romanowicz. Vol. 1 TechConnect, 2018. pp. 54-57
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