Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials

Tobin J Marks, Seng Tiong Ho, Zhifu Liu, Peiwang Zhu, De Gui Sun, Jing Ma, Yegao Xiao, Hu Kang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

We describe here the fabrication and characterization of novel organic electro-optic materials composed of self-assembled superlattices. The SAS structures are intrinsically acentric and exhibit large second harmonic generation and electro-optic responses. This approach using SAS electro-optic materials has advantages such as not requiring poling for creating nonlinearity in the films and efficient film growth on a variety of substrates over large areas. Prototype waveguide electro-optic modulators have been fabricated using SAS films integrated with low-loss polymeric materials functioning as partial guiding and cladding layers. The waveguide EO modulators are fabricated using a multistep process including e-beam deposition, plasma-enhanced chemical vapor deposition, photolithography, and reactive ion etching. Electro-optic parameters such as the half-wave voltage and the effective electro-optic coefficient, and the velocity mismatch between the optical and radio frequency waves have been evaluated.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.G. Grote, T. Kaino
Pages133-143
Number of pages11
Volume4991
DOIs
Publication statusPublished - 2003
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Organic Photonic Materials and Devices V - San Jose, CA, United States
Duration: Jan 27 2003Jan 30 2003

Other

OtherPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Organic Photonic Materials and Devices V
CountryUnited States
CitySan Jose, CA
Period1/27/031/30/03

Fingerprint

Superlattices
Electrooptical effects
Modulators
electro-optics
superlattices
modulators
Waveguides
Semiconductor materials
waveguides
Polymers
SAS
Reactive ion etching
Photolithography
Film growth
photolithography
Plasma enhanced chemical vapor deposition
Harmonic generation
harmonic generations
radio frequencies
nonlinearity

Keywords

  • Electro-optic materials
  • Electro-optic modulators
  • Polymers
  • Self-assembled superlattices
  • Thin films

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Marks, T. J., Ho, S. T., Liu, Z., Zhu, P., Sun, D. G., Ma, J., ... Kang, H. (2003). Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials. In J. G. Grote, & T. Kaino (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4991, pp. 133-143) https://doi.org/10.1117/12.479441

Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials. / Marks, Tobin J; Ho, Seng Tiong; Liu, Zhifu; Zhu, Peiwang; Sun, De Gui; Ma, Jing; Xiao, Yegao; Kang, Hu.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / J.G. Grote; T. Kaino. Vol. 4991 2003. p. 133-143.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Marks, TJ, Ho, ST, Liu, Z, Zhu, P, Sun, DG, Ma, J, Xiao, Y & Kang, H 2003, Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials. in JG Grote & T Kaino (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4991, pp. 133-143, PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Organic Photonic Materials and Devices V, San Jose, CA, United States, 1/27/03. https://doi.org/10.1117/12.479441
Marks TJ, Ho ST, Liu Z, Zhu P, Sun DG, Ma J et al. Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials. In Grote JG, Kaino T, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4991. 2003. p. 133-143 https://doi.org/10.1117/12.479441
Marks, Tobin J ; Ho, Seng Tiong ; Liu, Zhifu ; Zhu, Peiwang ; Sun, De Gui ; Ma, Jing ; Xiao, Yegao ; Kang, Hu. / Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials. Proceedings of SPIE - The International Society for Optical Engineering. editor / J.G. Grote ; T. Kaino. Vol. 4991 2003. pp. 133-143
@inproceedings{61d7332933fc4f9fbc400d63048f9ba3,
title = "Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials",
abstract = "We describe here the fabrication and characterization of novel organic electro-optic materials composed of self-assembled superlattices. The SAS structures are intrinsically acentric and exhibit large second harmonic generation and electro-optic responses. This approach using SAS electro-optic materials has advantages such as not requiring poling for creating nonlinearity in the films and efficient film growth on a variety of substrates over large areas. Prototype waveguide electro-optic modulators have been fabricated using SAS films integrated with low-loss polymeric materials functioning as partial guiding and cladding layers. The waveguide EO modulators are fabricated using a multistep process including e-beam deposition, plasma-enhanced chemical vapor deposition, photolithography, and reactive ion etching. Electro-optic parameters such as the half-wave voltage and the effective electro-optic coefficient, and the velocity mismatch between the optical and radio frequency waves have been evaluated.",
keywords = "Electro-optic materials, Electro-optic modulators, Polymers, Self-assembled superlattices, Thin films",
author = "Marks, {Tobin J} and Ho, {Seng Tiong} and Zhifu Liu and Peiwang Zhu and Sun, {De Gui} and Jing Ma and Yegao Xiao and Hu Kang",
year = "2003",
doi = "10.1117/12.479441",
language = "English",
volume = "4991",
pages = "133--143",
editor = "J.G. Grote and T. Kaino",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Electro-optic waveguide modulators by the integration of self-assembled superlattices with polymeric and semiconductor materials

AU - Marks, Tobin J

AU - Ho, Seng Tiong

AU - Liu, Zhifu

AU - Zhu, Peiwang

AU - Sun, De Gui

AU - Ma, Jing

AU - Xiao, Yegao

AU - Kang, Hu

PY - 2003

Y1 - 2003

N2 - We describe here the fabrication and characterization of novel organic electro-optic materials composed of self-assembled superlattices. The SAS structures are intrinsically acentric and exhibit large second harmonic generation and electro-optic responses. This approach using SAS electro-optic materials has advantages such as not requiring poling for creating nonlinearity in the films and efficient film growth on a variety of substrates over large areas. Prototype waveguide electro-optic modulators have been fabricated using SAS films integrated with low-loss polymeric materials functioning as partial guiding and cladding layers. The waveguide EO modulators are fabricated using a multistep process including e-beam deposition, plasma-enhanced chemical vapor deposition, photolithography, and reactive ion etching. Electro-optic parameters such as the half-wave voltage and the effective electro-optic coefficient, and the velocity mismatch between the optical and radio frequency waves have been evaluated.

AB - We describe here the fabrication and characterization of novel organic electro-optic materials composed of self-assembled superlattices. The SAS structures are intrinsically acentric and exhibit large second harmonic generation and electro-optic responses. This approach using SAS electro-optic materials has advantages such as not requiring poling for creating nonlinearity in the films and efficient film growth on a variety of substrates over large areas. Prototype waveguide electro-optic modulators have been fabricated using SAS films integrated with low-loss polymeric materials functioning as partial guiding and cladding layers. The waveguide EO modulators are fabricated using a multistep process including e-beam deposition, plasma-enhanced chemical vapor deposition, photolithography, and reactive ion etching. Electro-optic parameters such as the half-wave voltage and the effective electro-optic coefficient, and the velocity mismatch between the optical and radio frequency waves have been evaluated.

KW - Electro-optic materials

KW - Electro-optic modulators

KW - Polymers

KW - Self-assembled superlattices

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=0242524609&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0242524609&partnerID=8YFLogxK

U2 - 10.1117/12.479441

DO - 10.1117/12.479441

M3 - Conference contribution

VL - 4991

SP - 133

EP - 143

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Grote, J.G.

A2 - Kaino, T.

ER -