Encapsulating bis(β-ketoiminato) polyethers. Volatile, fluorine-free barium precursors for metal - Organic chemical vapor deposition

Daniel B. Studebaker, Deborah A. Neumayer, Bruce J. Hinds, Charlotte L. Stern, Tobin J Marks

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

The synthesis, characterization, and incorporation in volatile metal - organic chemical vapor deposition (MOCVD) precursors of a new class of linked β-ketoiminate-polyether-β-ketoiminate ligands is presented. These ligands are designed to encapsulate alkaline-earth cations having low charges and large ionic radii. Barium complexes having the general formula Ba[(RCOCHC(R')N)2(R'')] (R = tert-butyl or CF3; R' = tert-butyl, methyl, or CF3; R'' = -(CH2CH2O)4CH2CH2- or -(CH2CH2O)5CH2CH2)-) were prepared and characterized by 1H and 13C NMR spectroscopy, elemental analysis, and mass spectrometry. Single-crystal X-ray diffraction analysis of 2,2,5,25,28,28-hexamethyl-9,12,15,18,21-pentaoxa-4,25,diene-6,24-diimino-3,27 -pentacosadionatobarium(II) reveals a monomeric, nine-coordinate, tricapped trigonal prismatic coordination geometry. Single-crystal X-ray structural analysis of 1,1,1,24,24,24-hexafluoro-4,21-ditrifluoromethyl-8,11,14,17-tetraoxa-3,21-die ne-5,20-diimino-2,23-tetracosadionatobarium(II)·2DMSO reveals a monomeric, ten-coordinate, distorted tetracapped trigonal prismatic coordination geometry. Volatility data are presented for these barium complexes, demonstrating viability as MOCVD precursors. In addition, it is demonstrated that thin epitaxial films of BaTiO3 can be grown on (001) MgO by low-pressure MOCVD techniques using one of these barium complexes and Ti(dipivaloylmethanate)2(isopropoxide)2 as precursors.

Original languageEnglish
Pages (from-to)3148-3157
Number of pages10
JournalInorganic Chemistry
Volume39
Issue number15
DOIs
Publication statusPublished - Jul 24 2000

Fingerprint

Organic Chemicals
encapsulating
Fluorine
Polyethers
Barium
barium
metalorganic chemical vapor deposition
fluorine
Chemical vapor deposition
Metals
Single crystals
Ligands
ligands
Geometry
volatility
Epitaxial films
single crystals
dienes
geometry
viability

ASJC Scopus subject areas

  • Inorganic Chemistry

Cite this

Encapsulating bis(β-ketoiminato) polyethers. Volatile, fluorine-free barium precursors for metal - Organic chemical vapor deposition. / Studebaker, Daniel B.; Neumayer, Deborah A.; Hinds, Bruce J.; Stern, Charlotte L.; Marks, Tobin J.

In: Inorganic Chemistry, Vol. 39, No. 15, 24.07.2000, p. 3148-3157.

Research output: Contribution to journalArticle

Studebaker, Daniel B. ; Neumayer, Deborah A. ; Hinds, Bruce J. ; Stern, Charlotte L. ; Marks, Tobin J. / Encapsulating bis(β-ketoiminato) polyethers. Volatile, fluorine-free barium precursors for metal - Organic chemical vapor deposition. In: Inorganic Chemistry. 2000 ; Vol. 39, No. 15. pp. 3148-3157.
@article{63db82f6347442e3a94b24e7d64e62c4,
title = "Encapsulating bis(β-ketoiminato) polyethers. Volatile, fluorine-free barium precursors for metal - Organic chemical vapor deposition",
abstract = "The synthesis, characterization, and incorporation in volatile metal - organic chemical vapor deposition (MOCVD) precursors of a new class of linked β-ketoiminate-polyether-β-ketoiminate ligands is presented. These ligands are designed to encapsulate alkaline-earth cations having low charges and large ionic radii. Barium complexes having the general formula Ba[(RCOCHC(R')N)2(R'')] (R = tert-butyl or CF3; R' = tert-butyl, methyl, or CF3; R'' = -(CH2CH2O)4CH2CH2- or -(CH2CH2O)5CH2CH2)-) were prepared and characterized by 1H and 13C NMR spectroscopy, elemental analysis, and mass spectrometry. Single-crystal X-ray diffraction analysis of 2,2,5,25,28,28-hexamethyl-9,12,15,18,21-pentaoxa-4,25,diene-6,24-diimino-3,27 -pentacosadionatobarium(II) reveals a monomeric, nine-coordinate, tricapped trigonal prismatic coordination geometry. Single-crystal X-ray structural analysis of 1,1,1,24,24,24-hexafluoro-4,21-ditrifluoromethyl-8,11,14,17-tetraoxa-3,21-die ne-5,20-diimino-2,23-tetracosadionatobarium(II)·2DMSO reveals a monomeric, ten-coordinate, distorted tetracapped trigonal prismatic coordination geometry. Volatility data are presented for these barium complexes, demonstrating viability as MOCVD precursors. In addition, it is demonstrated that thin epitaxial films of BaTiO3 can be grown on (001) MgO by low-pressure MOCVD techniques using one of these barium complexes and Ti(dipivaloylmethanate)2(isopropoxide)2 as precursors.",
author = "Studebaker, {Daniel B.} and Neumayer, {Deborah A.} and Hinds, {Bruce J.} and Stern, {Charlotte L.} and Marks, {Tobin J}",
year = "2000",
month = "7",
day = "24",
doi = "10.1021/ic991161a",
language = "English",
volume = "39",
pages = "3148--3157",
journal = "Inorganic Chemistry",
issn = "0020-1669",
publisher = "American Chemical Society",
number = "15",

}

TY - JOUR

T1 - Encapsulating bis(β-ketoiminato) polyethers. Volatile, fluorine-free barium precursors for metal - Organic chemical vapor deposition

AU - Studebaker, Daniel B.

AU - Neumayer, Deborah A.

AU - Hinds, Bruce J.

AU - Stern, Charlotte L.

AU - Marks, Tobin J

PY - 2000/7/24

Y1 - 2000/7/24

N2 - The synthesis, characterization, and incorporation in volatile metal - organic chemical vapor deposition (MOCVD) precursors of a new class of linked β-ketoiminate-polyether-β-ketoiminate ligands is presented. These ligands are designed to encapsulate alkaline-earth cations having low charges and large ionic radii. Barium complexes having the general formula Ba[(RCOCHC(R')N)2(R'')] (R = tert-butyl or CF3; R' = tert-butyl, methyl, or CF3; R'' = -(CH2CH2O)4CH2CH2- or -(CH2CH2O)5CH2CH2)-) were prepared and characterized by 1H and 13C NMR spectroscopy, elemental analysis, and mass spectrometry. Single-crystal X-ray diffraction analysis of 2,2,5,25,28,28-hexamethyl-9,12,15,18,21-pentaoxa-4,25,diene-6,24-diimino-3,27 -pentacosadionatobarium(II) reveals a monomeric, nine-coordinate, tricapped trigonal prismatic coordination geometry. Single-crystal X-ray structural analysis of 1,1,1,24,24,24-hexafluoro-4,21-ditrifluoromethyl-8,11,14,17-tetraoxa-3,21-die ne-5,20-diimino-2,23-tetracosadionatobarium(II)·2DMSO reveals a monomeric, ten-coordinate, distorted tetracapped trigonal prismatic coordination geometry. Volatility data are presented for these barium complexes, demonstrating viability as MOCVD precursors. In addition, it is demonstrated that thin epitaxial films of BaTiO3 can be grown on (001) MgO by low-pressure MOCVD techniques using one of these barium complexes and Ti(dipivaloylmethanate)2(isopropoxide)2 as precursors.

AB - The synthesis, characterization, and incorporation in volatile metal - organic chemical vapor deposition (MOCVD) precursors of a new class of linked β-ketoiminate-polyether-β-ketoiminate ligands is presented. These ligands are designed to encapsulate alkaline-earth cations having low charges and large ionic radii. Barium complexes having the general formula Ba[(RCOCHC(R')N)2(R'')] (R = tert-butyl or CF3; R' = tert-butyl, methyl, or CF3; R'' = -(CH2CH2O)4CH2CH2- or -(CH2CH2O)5CH2CH2)-) were prepared and characterized by 1H and 13C NMR spectroscopy, elemental analysis, and mass spectrometry. Single-crystal X-ray diffraction analysis of 2,2,5,25,28,28-hexamethyl-9,12,15,18,21-pentaoxa-4,25,diene-6,24-diimino-3,27 -pentacosadionatobarium(II) reveals a monomeric, nine-coordinate, tricapped trigonal prismatic coordination geometry. Single-crystal X-ray structural analysis of 1,1,1,24,24,24-hexafluoro-4,21-ditrifluoromethyl-8,11,14,17-tetraoxa-3,21-die ne-5,20-diimino-2,23-tetracosadionatobarium(II)·2DMSO reveals a monomeric, ten-coordinate, distorted tetracapped trigonal prismatic coordination geometry. Volatility data are presented for these barium complexes, demonstrating viability as MOCVD precursors. In addition, it is demonstrated that thin epitaxial films of BaTiO3 can be grown on (001) MgO by low-pressure MOCVD techniques using one of these barium complexes and Ti(dipivaloylmethanate)2(isopropoxide)2 as precursors.

UR - http://www.scopus.com/inward/record.url?scp=0034709865&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034709865&partnerID=8YFLogxK

U2 - 10.1021/ic991161a

DO - 10.1021/ic991161a

M3 - Article

VL - 39

SP - 3148

EP - 3157

JO - Inorganic Chemistry

JF - Inorganic Chemistry

SN - 0020-1669

IS - 15

ER -