Epitaxial growth of (Sr1-xCax)CuO2 thin film with the infinite-layer structure by metal-organic chemical vapor deposition

K. W. Chang, B. W. Wessels, D. Studebaker, Tobin J Marks

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3 Citations (Scopus)


Phase-pure epitaxial (81-xCax)CuO2 thin films having the infinite-layer crystal structure were grown on SrTiO3 (100) substrates by low pressure metal-organic chemical vapor deposition using fluorinated metal-organic precursors. The substrate temperature and reactant gas (O2, H2O) partial pressure are crucial for stabilizing the tetragonal infinite-layer structure. Films with compositions over the range x=0-0.3 can be stabilized. In-plane epitaxy was confirmed by x-ray diffraction Φ scan. The films were semiconducting but exhibit resistivity anomalies. The orthorhombic phases of Sr2CuO3 and SrCuO2 were stabilized at 700 $C and 750 °C, respectively.

Original languageEnglish
Pages (from-to)1951-1953
Number of pages3
JournalApplied Physics Letters
Issue number13
Publication statusPublished - Sep 23 1996


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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